This chapter gives an introduction to the epitaxial growth of thin films on solid substrates.
The term epitaxy refers to the growth of a crystalline layer on (epi) the surface of a crystalline …

When the adsorbate coverage exceeds the monolayer range, one speaks about thin film
growth. The oriented growth of a crystalline film on a single-crystal substrate is referred to as …

Publisher Summary This chapter discusses surface processes in epitaxial growth. The solid-
vapor interface can be observed by an array of surface science and microscope-based …

The workshop's goal was to bring together theorists and experimentalists from two related
fields, surface science and thin-film growth, to highlight their common interests and …

An introductory review of the central ideas in the kinetics of submonolayer and multilayer
epitaxial growth is followed by a more detailed discussion of some recent developments in …

We study the second layer nucleation on top of islands emerging during epitaxial growth of
thin films. By employing kinetic Monte Carlo simulations we determine the critical island …

Abstract 'Epitaxy'means order in the relative orientation of identical crystals nucleated and
grown on a large single-crystal face. Every crystal of the deposited material is oriented in …

A simple yet realistic model is introduced for the description of islands of epitaxial
overgrowth on a substrate surface. The model is employed to examine the potential energy …

Physical processes operating in the growth of epitaxial deposits are identified and
discussed. Nucleation processes determine the nucleation rate, the density of discrete …

Deposition processes often involve surface and fluid-phase phenomena that are inherently
coupled but occur over different time and length scales. A multiscale integration hybrid …