Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

Cluster tools provide a flexible, reconfigurable, and efficient environment for several
manufacturing processes (eg, semiconductor manufacturing). A new timing constraint …

Optimal cyclic scheduling problems of wafer-residency-time-constrained dual-arm cluster
tools in wafer fabrication are challenging and remain to be fully solved. Existing studies …

Integrated circuit chips are produced on silicon wafers. Robotic cluster tools are widely used
since they provide a reconfigurable and efficient environment for most wafer fabrication …

Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …

With the reduction of wafer batch size on account of the diversification and individuation of
consumption demands, increasing importance has been attached to the schedulability and …

We examine a scheduling problem of cluster tools that concurrently process two wafer types
in a cyclic operational sequence. Whereas the process steps for different wafer types are …

Some wafer fabrication processes require a wafer to visit some processing modules in a
cluster tool multiple times, leading to a wafer revisiting process. They may pose wafer …

Cluster tools, which combine several single-wafer processing modules with wafer handling
robots in a closed environment, have been increasingly used for most wafer fabrication …

As wafer circuit widths shrink down, wafer fabrication processes require stringent quality
control. Therefore, fabs recently tend to clean a chamber after processing each wafer, in …