In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

Scheduling a cluster tool with wafer residency time constraints is challenging and important
in wafer manufacturing. With a backward strategy, the scheduling problem of such …

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap
strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer …

Due to the trends of larger wafer diameters and smaller lot sizes, cluster tools need to switch
from processing one lot of wafers to another frequently. This leads to more transient periods …

For some wafer fabrication processes in cluster tools, eg, atomic layer deposition (ALD),
wafer revisiting is required. Typically, in such processes, wafers need to visit two …

With wafer residency time constraints for some wafer fabrication processes, such as low
pressure chemical-vapor deposition, the schedulability and scheduling problems are still …

Because of residency time constraints and activity time variation of cluster tools, it is very
difficult to operate such integrated semiconductor manufacturing equipment. This paper …

Semiconductor cluster tools are the integrated equipment to process a variety of silicon
wafers for the fabrication of microelectronic components. The cluster tool system consists of …

This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …

In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …