Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance
for advancing nanoscience and nanotechnology. While the capability of current …

Sub-10 nm nanostructures have received broad interest for their intriguing nano-optical
phenomena, such as extreme field localization and enhancement, quantum tunneling effect …

In the past decades, Moore's law drives the semiconductor industry to continuously shrink
the critical size of transistors down to 7 nm. As transistors further downscaling to smaller …

Nanoscale science and technology is a young and burgeoning field that encompasses
nearly every discipline of science and engineering. With rapid advances in areas such as …

In the last decade, some low-cost nanofabrication technologies used in several disciplines
of nanotechnology have demonstrated promising results in terms of versatility and scalability …

Photolithography is one of the most commonly used techniques in semiconductor
manufacturing, which is the foundation for all the modern electronic device fabrication …

Semiconductor chip manufacturing is by far the predominant nanomanufacturing technology
in the world today. Top-down lithography techniques are used for fabrication of logic and …

Human beings have witnessed unprecedented developments since the 1760s using
precision tools and manufacturing methods that have led to ever-increasing precision, from …

Micro/nano functional devices featuring deep integration, intelligence, and miniaturization
have attracted considerable attention in frontier areas of research, such as micro/nano …

Micro-and nano-scale devices are used in electronics, micro-electro-mechanical, bio-
analytical and medical components. An essential step for the fabrication of such small scale …