Optimal one-wafer cyclic scheduling and buffer space configuration for single-arm multicluster tools with linear topology
This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …
Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets
A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …
Petri net-based optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in wafer fabrication
In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …
Optimal scheduling of complex multi-cluster tools based on timed resource-oriented Petri nets
Complex multi-cluster tools have been extensively used in semiconductor manufacturing. It
is crucial to increase their productivity by their effective operation. With structural complexity …
is crucial to increase their productivity by their effective operation. With structural complexity …
Petri net-based optimal one-wafer scheduling of single-arm multi-cluster tools in semiconductor manufacturing
In operating a multi-cluster tool, it needs to coordinate the activities of multiple robots. Thus,
it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic …
it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic …
Scheduling of single-arm multi-cluster tools with wafer residency time constraints in semiconductor manufacturing
This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …
wafer residency time constraints. They have a linear topology and their bottleneck tool is …
Petri net-based polynomially complex approach to optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in semiconductor manufacturing
Due to the different behavior of single-arm and dual-arm cluster tools, it is challenging to
schedule a hybrid multi-cluster tool containing both of them. This paper aims to find an …
schedule a hybrid multi-cluster tool containing both of them. This paper aims to find an …
A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis
Because of wafer residency time constraints for cluster tools, it is very difficult to schedule
them. This paper addresses their scheduling issues and conducts their schedulability and …
them. This paper addresses their scheduling issues and conducts their schedulability and …
Petri net decomposition approach to deadlock-free and non-cyclic scheduling of dual-armed cluster tools
T Nishi, I Matsumoto - IEEE Transactions on Automation …, 2013 - ieeexplore.ieee.org
Semiconductor cluster tools are the integrated equipment to process a variety of silicon
wafers for the fabrication of microelectronic components. The cluster tool system consists of …
wafers for the fabrication of microelectronic components. The cluster tool system consists of …
Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations
In this paper, we analyze optimal scheduling of a tree-like multicluster tool with single-blade
robots and constant robot moving times. We present a recursive minimal cycle time …
robots and constant robot moving times. We present a recursive minimal cycle time …
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