To deal with vibration disturbance in interferometric measurement of surface topography, we
present a simultaneous dual-wavelength phase-shifting interferometry (SDWPSI). SDWPSI …

Urgent needs for high-speed, non-contact and on-line measurement with high accuracy and
repeatability are of great interest for automatic optical inspection (AOI) industries. Therefore …

One important issue in phase-shifting interferometry is to eliminate phase-shift errors so as
to enhance achievable measurement accuracy. We propose a new phase-measuring …

Conventional multi-wavelength phase-shifting interferometry utilizes two or three
monochromatic light sources, such as lasers, to realize the measurement of the surface …

In this investigation, we propose an effective method to measure 3D surface profiles of
specimens with single-shot imaging. Based on the two-wavelength interferometric principle …

Wavelength-tuning phase-shifting interferometry plays a significant role in the
measurements of transparent parallel plates. The difficulty of multi-surface measurements is …

Optical interferometry is a powerful tool for measuring and characterizing areal surface
topography in precision manufacturing. A variety of instruments based on optical …

The accuracy of phase shift extraction has a significant influence on measurement results in
surface micro-topography interferometry. Phase shifting errors are mainly caused by …

An advanced interferometer was built for surface metrology in environments with severe
vibration. This instrument uses active control to compensate for effects of vibration to allow …

A method to obtain unambiguous surface height measurements using wavelength scanning
interferometry with an improved repeatability, comparable to that obtainable using phase …