A robotic cluster tool involves many activities whose time is subject to some disturbance,
thus leading to the activity time variation. It results in wafer sojourn time fluctuation in a …

With wafer residency time constraints, it is crucial to schedule a cluster tool in semiconductor
fabrication such that the wafer sojourn time in a processing module is in a given range …

Because of residency time constraints and activity time variation of cluster tools, it is very
difficult to operate such integrated semiconductor manufacturing equipment. This paper …

When scheduling cluster tools under wafer residency time constraints, wafer sojourn time in
a processing module should be carefully controlled such that it is in a permissive range …

Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

Wafer revisiting and residency time constraints complicate the scheduling problem of cluster
tools in semiconductor manufacturing. Random disturbance to the activity time in operating a …

With wafer residency time constraint of cluster tools in semiconductor manufacturing, activity
time variation can make an originally feasible schedule infeasible. Thus, it is difficult to …

In semiconductor manufacturing, wafer residency time constraints make the scheduling
problem of cluster tools complicated. A process module (PM) in cluster tools is prone to …

For some wafer fabrication processes in cluster tools, eg, atomic layer deposition (ALD),
wafer revisiting is required. Typically, in such processes, wafers need to visit two …

Scheduling a multicluster tool with wafer residency time constraints is highly challenging yet
important in ensuring high productivity of wafer fabrication. This paper presents a method to …