The combination of three-dimensional microassembly and bulk micromachining allows
manufacturing robots that are small, precise, dexterous and that have a large payload …

Recent advances in MEMS fabrication, hybrid microassembly and packaging are expediting
micomanufacturing of" die-size" microrobots. The ARRIpede is a 1cm times 1cm walking …

This paper presents a microassembled robot called the Articulated Four Axes Microrobot
(AFAM). Target application areas include micro and nano part manipulation and probing …

Microassembly systems utilizing precision robotics have long been used for realizing three-
dimensional microstructures such as microsystems and microrobots. Prior to assembly …

This article introduces and explores the current frontier four-legged (quadruped) and six-
legged (hexapod) crawling micro-robots. The performances of various crawling micro-robots …

This paper presents a unique four-axis articulated MEMS robot, constructed by
microassembly, targeting micro and nano scale manipulation and probing applications. The …

Although robotic micromanipulation using microtweezers has been widely explored, the
current manipulation throughput hardly exceeds one operation per second. Increasing the …

Soft crawling robots have attracted great attention due to their anticipated effective
interactions with humans and uncertain environments, as well as their potential capabilities …

Based on small mobile robots the presented MINIMAN system provides a platform for micro-
manipulation tasks in very different kinds of applications. Three exemplary applications …

Recent advances in 2frac12D and 3D hybrid microassembly using MEMS snap fasteners
and die-level bonding for interconnects, makes possible the miniaturization of exciting new …