In today's semiconductor manufacturing industry, wafer foundries often face the challenge of
producing a variety of integrated circuit chip products using a single manufacturing line. To …

To satisfy the requirements of high-mix integrated-circuit chip production, multiple wafer
types are grouped into a lot to be fabricated concurrently in a multi-cluster tool system …

Multi-cluster tools are widely used in majority of wafer fabrication processes in
semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer …

Accompanying the unceasing progress of integrated circuit manufacturing technology, the
mainstream production mode of current semiconductor wafer fabrication is featured with …

Multi-cluster tools are highly productive yet expensive wafer fabricating facility in
semiconductor industry. Current competitive business trend requires high-mix and low …

Optimal cyclic scheduling problems of wafer-residency-time-constrained dual-arm cluster
tools in wafer fabrication are challenging and remain to be fully solved. Existing studies …

The semiconductor manufacturing industry is significantly expensive both in equipment and
materials. Cluster tools, a type of automated manufacturing system integrating processing …

With the rapid changes and diversity of market demand, fabs have to produce wafers in
many varieties and small batches. This brings a great challenge to the scheduling of wafer …

In semiconductor manufacturing, to improve the throughput of cluster tools, process modules
(PMs) are designed to have multiple spaces such that more than one wafers can be …

In semiconductor manufacturing, multi-space process modules (PMs) are adopted in some
cluster tools for wafer processing. With multi-space PMs, a PM can have multiple wafers …