Cellular Toxicity Assessment and Environmental Impact of Pre-and Post-CMP Nanoparticle Slurries

K Kosaraju, S Crawford, S Aravamudhan - ECS Transactions, 2015 - iopscience.iop.org
Nanoparticles (NPs) of silica, ceria and alumina are used as polishing slurries for Chemical
Mechanical Planarization (CMP). However, the regulations for use and toxic levels of ENPs …
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[引用][C] Cellular Toxicity Assessment and Environmental Impact of Pre-and Post-CMP Nanoparticle Slurries

K Kosaraju, S Crawford… - ECS Transactions, 2015 - ui.adsabs.harvard.edu
Cellular Toxicity Assessment and Environmental Impact of Pre- and Post-CMP Nanoparticle
Slurries - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …

Cellular Toxicity Assessment and Environmental Impact of Pre-and Post-CMP Nanoparticle Slurries

K Kosaraju, M Tarannum, S Crawford… - Electrochemical …, 2015 - iopscience.iop.org
Engineered Nanoparticles (ENPs) of silica, ceria and alumina are used as polishing slurries
for Chemical Mechanical Planarization (CMP). However, the regulations for use and toxic …