Laser-processing for patterned and free-standing nitride films
MK Kelly, O Ambacher, R Dimitrov… - MRS Online …, 1997 - cambridge.org
Films of GaN and related materials can be processed by methods that invoke thermal
decomposition, induced by intense illumination with a pulsed laser. At elevated …
decomposition, induced by intense illumination with a pulsed laser. At elevated …
Spectral analysis of above-, below-, and near-bandedge phenomena in GaN thin films
NV Edwards, SD Yoo, MD Bremser, T Zheleva… - Materials Science and …, 1997 - Elsevier
We report spectroscopic ellipsometry (SE) and low-temperature reflectance data on epitaxial
GaN thin film samples covering the widest range of tensile and compressive stress (− 3.8 …
GaN thin film samples covering the widest range of tensile and compressive stress (− 3.8 …