Stable indium oxide thin-film transistors with fast threshold voltage recovery
Stable thin-film transistors (TFTs) with semiconducting indium oxide channel and silicon
dioxide gate dielectric were fabricated by reactive ion beam assisted evaporation and …
dioxide gate dielectric were fabricated by reactive ion beam assisted evaporation and …
Room temperature growth of indium oxide films by reactive ion beam assisted deposition
Conducting and semiconducting indium oxide thin films have been grown at room
temperature by oxygen ion beam assisted e-beam evaporation. We studied an influence of …
temperature by oxygen ion beam assisted e-beam evaporation. We studied an influence of …