Fluorine-ion-implanted air-bearing surface for low-friction head–disk interface

Y Shimizu, N Umehara, J Xu - Microsystem technologies, 2010 - Springer
With the aim of reducing the lubricant–slider interaction by reducing slider surface energy,
we fabricated several types of sliders with fluorine-ion-implanted (FII) air-bearing surfaces by …

Fabrication of sub-20 nm nanostructures by combination of nano plastic forming and etching (NPFE)

H Rashidi, M Yoshino - Journal of Micromechanics and …, 2010 - iopscience.iop.org
In this paper, a novel nanofabrication process with sub-20 nm resolution and low cost is
proposed and its feasibility is demonstrated. The process utilizes a metal coating as a resist …

Micro Texturing of Polycarbonate Plate with Ion Beam Irradiation and its Friction Properties in Water

N Umehara, Y Demizu, J Nishio… - Key Engineering …, 2010 - Trans Tech Publ
In order to fabricate micro textured polymer plate, some kinds of ions were irradiated to the
substrate by using an Electron Cyclotron Resonance (ECR) ion shower apparatus. Surface …

T1602-1-2 Rapid Modification of Surface Optical and Wettability Properties Using the Combination of Nano Plastic Forming, Coating, and Roller Imprinting Processes

W Kurnia, T Matsumura, M Yoshino - The proceedings of the JSME …, 2010 - jstage.jst.go.jp
抄録 In this paper, the combination of Nano Plastic Forming, coating, and roller imprinting
processes, abbreviated as NPF-CRI, is used to rapidly modify the surface functional …