Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
This work reports on low temperature deposition of conducting indium oxide films by a radio-
frequency plasma enhanced reactive thermal evaporation (rf-PERTE) technique. The films …
frequency plasma enhanced reactive thermal evaporation (rf-PERTE) technique. The films …
Multicomponent IGZO ceramics for transparent electrode target fabricated from oxides and nitrates
HK Lee, JH Yoon, KS Cho - Journal of Powder Materials, 2019 - koreascience.kr
Homogeneous multicomponent indium gallium zinc oxide (IGZO) ceramics for transparent
electrode targets are prepared from the oxides and nitrates as the source materials, and …
electrode targets are prepared from the oxides and nitrates as the source materials, and …