Sequential infiltration synthesis apparatus

IJ Raaijmakers, JW Maes, W Knaepen… - US Patent …, 2023 - Google Patents
2017-02-28 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …

Layer forming method and apparatus

A Klaver, W Knaepen, L Jdira, G Van Der Star… - US Patent …, 2023 - Google Patents
There is provided a method and apparatus for forming a layer, by sequentially repeating a
layer deposition cycle to process a substrate disposed in a reaction chamber. The …

Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate

M Verghese, T Dunn, JK Shugrue - US Patent 11,629,406, 2023 - Google Patents
2018-03-09 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …

Vertical batch furnace assembly

CGM De Ridder - US Patent 11,587,814, 2023 - Google Patents
H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state
devices during manufacture or treatment thereof; Apparatus specially adapted for handling …

Methods of forming silicon germanium structures

R Khazaka, LPB Lima - US Patent 11,688,603, 2023 - Google Patents
Methods for forming structures that include a layer comprising silicon germanium are
disclosed. Exemplary embodiments of the disclosure provide improved methods of forming a …

Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

B Zope, K Shrestha, S Swaminathan, C Zhu… - US Patent …, 2023 - Google Patents
2021-02-01 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …

Methods for selective deposition of doped semiconductor material

LPB Lima, R Khazaka, Q Xie - US Patent 11,637,014, 2023 - Google Patents
2020-10-21 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …

Gas flow control plate for substrate processing apparatus

JH Shin, J Kim, J Lee, J Hyunsoo - US Patent App. 29/782,977, 2023 - Google Patents
2021-08-06 Assigned to ASM IP HOLDING BV reassignment ASM IP HOLDING BV
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors …

Gas distributor for substrate processing apparatus

JH Shin, J Kim, J Lee, J Hyunsoo - US Patent App. 29/782,978, 2023 - Google Patents
FIG. 1 is a top perspective view of a gas distributor for substrate processing apparatus
showing our new design; FIG. 2 is a bottom perspective view thereof; FIG. 3 is a top plan …

Laser alignment fixture for a reactor system

S Ganguli, TR Dunn, A Kimtee - US Patent 11,626,308, 2023 - Google Patents
A laser alignment fixture for a reactor system may be used to align components of the reactor
system to allow for a uniform deposition of a thin film onto a substrate. The laser alignment …