[HTML][HTML] Nanoelectromechanical sensors based on suspended 2D materials

MC Lemme, S Wagner, K Lee, X Fan, GJ Verbiest… - Research, 2020 - spj.science.org
The unique properties and atomic thickness of two-dimensional (2D) materials enable
smaller and better nanoelectromechanical sensors with novel functionalities. During the last …

Low operating voltage carbon–graphene hybrid E-textile for temperature sensing

G Rajan, JJ Morgan, C Murphy… - … applied materials & …, 2020 - ACS Publications
Graphene-coated polypropylene (PP) textile fibers are presented for their use as
temperature sensors. These temperature sensors show a negative thermal coefficient of …

[HTML][HTML] Sensitive capacitive pressure sensors based on graphene membrane arrays

M Šiškins, M Lee, D Wehenkel, R van Rijn… - Microsystems & …, 2020 - nature.com
The high flexibility, impermeability and strength of graphene membranes are key properties
that can enable the next generation of nanomechanical sensors. However, for capacitive …

[HTML][HTML] Overview of the MEMS Pirani sensors

S Xu, N Zhou, M Shi, C Zhang, D Chen, H Mao - Micromachines, 2022 - mdpi.com
Vacuum equipment has a wide range of applications, and vacuum monitoring in such
equipment is necessary in order to meet practical applications. Pirani sensors work by using …

Multi-layer graphene pirani pressure sensors

J Romijn, RJ Dolleman, M Singh… - …, 2021 - iopscience.iop.org
The operating principle of Pirani pressure sensors is based on the pressure dependence of
a suspended strip's electrical conductivity, caused by the thermal conductance of the …

Surface-micromachined silicon carbide Pirani gauges for harsh environments

J Mo, LM Middelburg, B Morana… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
The application of pressure sensors in harsh environments is typically hindered by the
stability of the material over long periods of time. This work focuses on the design and …

Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring

M Garg, DS Arya, S Sharma, S Kumar… - Journal of …, 2021 - ieeexplore.ieee.org
The letter reports highly sensitive metal oxide (V 2 O 5) based NanoElectromechanical
Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence …

Broad-Range Fast Response Vacuum Pressure Sensors Based on a Graphene Nanocomposite with Hollow α-Fe2O3 Microspheres

V Shirhatti, S Nuthalapati… - ACS Applied …, 2020 - ACS Publications
This paper demonstrates the application of a graphene–ferric oxide (hollow mesoporous α-
Fe2O3 microspheres) nanocomposite for the measurement of vacuum pressure. Numerous …

Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range

M Garg, DS Arya, S Kumar, K Joshi… - Journal of …, 2024 - iopscience.iop.org
An electrostatically actuated all-metal microelectromechanical systems (MEMS) Pirani
gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap …

[HTML][HTML] Influence of defect density on the gas sensing properties of multi-layered graphene grown by chemical vapor deposition

F Ricciardella, S Vollebregt, R Tilmann, O Hartwig… - Carbon Trends, 2021 - Elsevier
Chemical vapor deposition (CVD) has been demonstrated as a highly promising technique
for the production of graphene on large scale and enabling tunability of the intrinsic defects …