[HTML][HTML] Nanoelectromechanical sensors based on suspended 2D materials
The unique properties and atomic thickness of two-dimensional (2D) materials enable
smaller and better nanoelectromechanical sensors with novel functionalities. During the last …
smaller and better nanoelectromechanical sensors with novel functionalities. During the last …
Low operating voltage carbon–graphene hybrid E-textile for temperature sensing
Graphene-coated polypropylene (PP) textile fibers are presented for their use as
temperature sensors. These temperature sensors show a negative thermal coefficient of …
temperature sensors. These temperature sensors show a negative thermal coefficient of …
[HTML][HTML] Sensitive capacitive pressure sensors based on graphene membrane arrays
The high flexibility, impermeability and strength of graphene membranes are key properties
that can enable the next generation of nanomechanical sensors. However, for capacitive …
that can enable the next generation of nanomechanical sensors. However, for capacitive …
[HTML][HTML] Overview of the MEMS Pirani sensors
S Xu, N Zhou, M Shi, C Zhang, D Chen, H Mao - Micromachines, 2022 - mdpi.com
Vacuum equipment has a wide range of applications, and vacuum monitoring in such
equipment is necessary in order to meet practical applications. Pirani sensors work by using …
equipment is necessary in order to meet practical applications. Pirani sensors work by using …
Multi-layer graphene pirani pressure sensors
J Romijn, RJ Dolleman, M Singh… - …, 2021 - iopscience.iop.org
The operating principle of Pirani pressure sensors is based on the pressure dependence of
a suspended strip's electrical conductivity, caused by the thermal conductance of the …
a suspended strip's electrical conductivity, caused by the thermal conductance of the …
Surface-micromachined silicon carbide Pirani gauges for harsh environments
The application of pressure sensors in harsh environments is typically hindered by the
stability of the material over long periods of time. This work focuses on the design and …
stability of the material over long periods of time. This work focuses on the design and …
Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring
The letter reports highly sensitive metal oxide (V 2 O 5) based NanoElectromechanical
Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence …
Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence …
Broad-Range Fast Response Vacuum Pressure Sensors Based on a Graphene Nanocomposite with Hollow α-Fe2O3 Microspheres
V Shirhatti, S Nuthalapati… - ACS Applied …, 2020 - ACS Publications
This paper demonstrates the application of a graphene–ferric oxide (hollow mesoporous α-
Fe2O3 microspheres) nanocomposite for the measurement of vacuum pressure. Numerous …
Fe2O3 microspheres) nanocomposite for the measurement of vacuum pressure. Numerous …
Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range
An electrostatically actuated all-metal microelectromechanical systems (MEMS) Pirani
gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap …
gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap …
[HTML][HTML] Influence of defect density on the gas sensing properties of multi-layered graphene grown by chemical vapor deposition
Chemical vapor deposition (CVD) has been demonstrated as a highly promising technique
for the production of graphene on large scale and enabling tunability of the intrinsic defects …
for the production of graphene on large scale and enabling tunability of the intrinsic defects …