Nanoelectromechanical systems were fabricated from single-and multilayer graphene
sheets by mechanically exfoliating thin sheets from graphite over trenches in silicon oxide …

The invention and initial demonstration of magnetic resonance force microscopy (MRFM) in
the early 1990s launched a renaissance of mechanical approaches to detecting magnetic …

The mechanical resonance of laterally grown silicon nanowires measured by an optical
interferometric technique is reported. The lengths and diameters of the nanowires ranged …

This research investigates the air drag damping effect of the micromachined cantilevers in
different resonance modes on the quality factor, which are operated in ambient air. Based on …

We analyze the dissipation of the vibrations of nano-mechanical devices. We show that the
coupling between flexural modes and two-level systems leads to sub-ohmic dissipation. The …

In this paper, we present new experimental data illustrating the importance of thermoelastic
damping in MEMS resonant sensors. We have used MEMS gyroscopes to demonstrate that …

Thermoelastic damping is a critical loss mechanism in micromachined resonators used for
sensing and communication applications. In this paper, thermoelastic damping of the …

This paper reports on low pressure chemical vapor deposited in-situ boron doped
polycrystalline germanium-silicon layers with 70% germanium content. The effect of …

纳米机械振子尺寸小, 质量轻, 可以用来制作探测力, 质量等微小物理量的超灵敏探测器.
石墨烯拥有质量轻, 密度低和杨氏模量高等特性, 被认为是制作纳米机械振子的理想材料 …

Miniaturized microtools based on recent nano/micromachining technology increase its
importance in nanoscale science and nanoengineering. We have developed various …