Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
The use of wide bandgap semiconductor thin films as sensing materials for micro-electrical–
mechanical systems (MEMS) sensors has been the subject of much discussion in the …
mechanical systems (MEMS) sensors has been the subject of much discussion in the …
Applications of graphene and its derivatives in chemical analysis
H Grajek, J Jonik, Z Witkiewicz, T Wawer… - Critical Reviews in …, 2020 - Taylor & Francis
In this review, the applications of graphene and its derivatives in the chemical analysis have
been described. The properties of graphene materials which are essential for their use in …
been described. The properties of graphene materials which are essential for their use in …
A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure
A surface acoustic wave (SAW) humidity sensor based on AlN/Si (doped) layered structure
and graphene oxide (GO) sensing layer is proposed for high sensitivity and low temperature …
and graphene oxide (GO) sensing layer is proposed for high sensitivity and low temperature …
Hydrogen sensors using 2‐dimensional materials: a review
Widespread application of hydrogen for energy storage, manufacturing processes, medical
treatment, and other uses has motivated development in hydrogen sensing technology for …
treatment, and other uses has motivated development in hydrogen sensing technology for …
Surface acoustic wave hydrogen sensors based on ZnO nanoparticles incorporated with a Pt catalyst
This paper describes the fabrication and characterization of surface acoustic wave (SAW)
hydrogen sensors using ZnO nanoparticles incorporated with a Pt catalyst for hydrogen …
hydrogen sensors using ZnO nanoparticles incorporated with a Pt catalyst for hydrogen …
Controllable growth of oriented ZnO nanorods using Ga-doped seed layers and surface acoustic wave humidity sensor
ZnO nanorods were grown on a Si/AlN structure using hydrothermal method. The fabricated
ZnO nanorod film was used as a sensitive material layer for surface acoustic wave (SAW) …
ZnO nanorod film was used as a sensitive material layer for surface acoustic wave (SAW) …
Influence of substrate temperature on structural properties and deposition rate of AlN thin film deposited by reactive magnetron sputtering
Aluminum nitride (AlN) thin films with c-axis preferred orientation have been prepared by
reactive direct-current (DC) magnetron sputtering. The degree of preferred crystal …
reactive direct-current (DC) magnetron sputtering. The degree of preferred crystal …
A surface acoustic wave ethanol sensor based on uniform ZnO nanoparticles-reduced graphene oxide composite film
D Li, K Pang, Q Zhang, M Qu, Z Xu, C Gao… - IEEE Sensors …, 2020 - ieeexplore.ieee.org
The uniformity and repeatability of sensing film will greatly affect the sensor-to-sensor
reproducibility. In this paper, an ethanol sensor based on a surface acoustic wave (SAW) …
reproducibility. In this paper, an ethanol sensor based on a surface acoustic wave (SAW) …
Hydrogen Gas Sensing Using Palladium‐Graphene Nanocomposite Material Based on Surface Acoustic Wave
We report the fabrication and characterization of surface acoustic wave (SAW) hydrogen
sensors using palladium‐graphene (Pd‐Gr) nanocomposite as sensing material. The Pd‐Gr …
sensors using palladium‐graphene (Pd‐Gr) nanocomposite as sensing material. The Pd‐Gr …
Surface acoustic wave humidity sensor based on polycrystalline AlN thin film coated with sol–gel derived nanocrystalline zinc oxide film
In this work, the nanocrystalline ZnO/polycrystalline (poly) aluminum nitride (AlN)/Si-layered
structure was fabricated for humidity sensor applications based on surface acoustic wave …
structure was fabricated for humidity sensor applications based on surface acoustic wave …