Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Control can enable high-bandwidth nanopositioning needed to increase the operating
speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact …

Nanotechnology is the science of understanding matter and the control of matter at
dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and …

The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated
XY nanopositioning stage are presented in this paper. The main goal of the design is to …

Piezoelectric tube scanners have emerged as the most widely used nanopositioning
technology in modern scanning probe microscopes. Despite their impressive properties …

We present a novel hysteresis compensation method for piezoelectric actuators. We
consider the hysteresis nonlinearity of the actuator as a disturbance over a linear system. A …

Nanopositioning is a key enabling technology for imaging, manipulation, measurement and
fabrication of matters at the nanoscale. Positioners driven by piezoelectric actuators are …

Self-sensing technique consists of using an actuator as a sensor at the same time. This is
possible for most actuators with physically reversible principle such as piezoelectric …

An XYZ nanopositioner is designed for fast the atomic force microscopy. The first resonant
modes of the device are measured at 8.8, 8.9, and 48.4 kHz along the X-, Y-, and Z-axes …

In this paper, a piezoelectric tube of the type typically used in scanning tunneling
microscopes (STMs) and atomic force microscopes (AFMs) is considered. Actuation of this …