Besides the excellent high-temperature mechanical properties, Si3N4 and SiC based
ceramics containing insulating or electrically conductive phase are attractive for their tunable …

Silicon carbonitride SiCN films have attracted considerable interest due to their outstanding
characteristics, such as dielectric, optical, mechanical properties, thermal stability, oxidation …

Since decades, the PECVD ('plasma enhanced chemical vapor deposition') processes have
emerged as one of the most convenient and versatile approaches to synthesize either …

This article focuses on control of film thickness and roughness to improve the ultraviolet (UV)-
protective performance of TiO2 films prepared by atmospheric-pressure plasma-enhanced …

Microporous silica membranes with high permselectivity are fabricated by atmospheric-
pressure plasma-enhanced chemical vapor deposition (AP-PECVD) using …

Microporous silica membranes have shown promise as potential candidates for energy-
efficient chemical separation. Herein, we report the ultrafast synthesis of silica membranes …

PECVD SiC: H (SiCN: H) films were produced using tetramethylsilane (TMS) as a precursor
in a mixture with inert helium or ammonia as a source of nitrogen. Mild plasma conditions …

The study on amorphous hydrogenated silicon carbonitride (a‐SiCN) thin film coatings
produced by remote plasma chemical vapor deposition from 1, 1, 3, 3‐tetramethyldisilazane …

We report an investigation into 1, 4-Bis-N, N-(trimethylsilyl) piperazine (BTMSP) as a novel
precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD) …

For decades, oil and water separation has remained a challenge. Not only oil spills but also
industrial oily wastewaters are threatening our environment. Over the years, oil–water …