Electromagnetic properties of Si–C–N based ceramics and composites
X Yin, L Kong, L Zhang, L Cheng… - International …, 2014 - journals.sagepub.com
Besides the excellent high-temperature mechanical properties, Si3N4 and SiC based
ceramics containing insulating or electrically conductive phase are attractive for their tunable …
ceramics containing insulating or electrically conductive phase are attractive for their tunable …
Organosilicon compounds as single-source precursors for SiCN films production
E Ermakova, M Kosinova - Journal of Organometallic Chemistry, 2022 - Elsevier
Silicon carbonitride SiCN films have attracted considerable interest due to their outstanding
characteristics, such as dielectric, optical, mechanical properties, thermal stability, oxidation …
characteristics, such as dielectric, optical, mechanical properties, thermal stability, oxidation …
[HTML][HTML] Foundations of plasma enhanced chemical vapor deposition of functional coatings
Since decades, the PECVD ('plasma enhanced chemical vapor deposition') processes have
emerged as one of the most convenient and versatile approaches to synthesize either …
emerged as one of the most convenient and versatile approaches to synthesize either …
UV-Protective TiO2 Thin Films with High Transparency in Visible Light Region Fabricated via Atmospheric-Pressure Plasma-Enhanced Chemical Vapor Deposition
J Xu, H Nagasawa, M Kanezashi… - ACS applied materials & …, 2018 - ACS Publications
This article focuses on control of film thickness and roughness to improve the ultraviolet (UV)-
protective performance of TiO2 films prepared by atmospheric-pressure plasma-enhanced …
protective performance of TiO2 films prepared by atmospheric-pressure plasma-enhanced …
Atmospheric-pressure plasma-enhanced chemical vapor deposition of microporous silica membranes for gas separation
H Nagasawa, Y Yamamoto, N Tsuda… - Journal of Membrane …, 2017 - Elsevier
Microporous silica membranes with high permselectivity are fabricated by atmospheric-
pressure plasma-enhanced chemical vapor deposition (AP-PECVD) using …
pressure plasma-enhanced chemical vapor deposition (AP-PECVD) using …
Ultrafast synthesis of silica-based molecular sieve membranes in dielectric barrier discharge at low temperature and atmospheric pressure
H Nagasawa, T Kagawa, T Noborio… - Journal of the …, 2020 - ACS Publications
Microporous silica membranes have shown promise as potential candidates for energy-
efficient chemical separation. Herein, we report the ultrafast synthesis of silica membranes …
efficient chemical separation. Herein, we report the ultrafast synthesis of silica membranes …
[HTML][HTML] Controlling of chemical bonding structure, wettability, optical characteristics of SiCN: H (SiC: H) films produced by PECVD using tetramethylsilane and …
E Ermakova, A Kolodin, A Fedorenko, I Yushina… - Coatings, 2023 - mdpi.com
PECVD SiC: H (SiCN: H) films were produced using tetramethylsilane (TMS) as a precursor
in a mixture with inert helium or ammonia as a source of nitrogen. Mild plasma conditions …
in a mixture with inert helium or ammonia as a source of nitrogen. Mild plasma conditions …
Amorphous silicon carbonitride (a‐SiCN) thin film coatings by remote plasma chemical vapor deposition using organosilicon precursor: Effect of substrate temperature
AM Wrobel, P Uznanski - Plasma Processes and Polymers, 2023 - Wiley Online Library
The study on amorphous hydrogenated silicon carbonitride (a‐SiCN) thin film coatings
produced by remote plasma chemical vapor deposition from 1, 1, 3, 3‐tetramethyldisilazane …
produced by remote plasma chemical vapor deposition from 1, 1, 3, 3‐tetramethyldisilazane …
[HTML][HTML] 1, 4-Bis (trimethylsilyl) piperazine—Thermal Properties and Application as CVD Precursor
E Ermakova, S Sysoev, I Tsyrendorzhieva, A Mareev… - Coatings, 2023 - mdpi.com
We report an investigation into 1, 4-Bis-N, N-(trimethylsilyl) piperazine (BTMSP) as a novel
precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD) …
precursor for the synthesis of silicon carbonitride films by chemical vapor deposition (CVD) …
[HTML][HTML] Simultaneous, efficient and continuous oil–water separation via antagonistically functionalized membranes prepared by atmospheric-pressure cold plasma
D Kim, R Mauchauffé, J Kim, SY Moon - Scientific Reports, 2021 - nature.com
For decades, oil and water separation has remained a challenge. Not only oil spills but also
industrial oily wastewaters are threatening our environment. Over the years, oil–water …
industrial oily wastewaters are threatening our environment. Over the years, oil–water …