[HTML][HTML] Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme

J Yanez, A Uranga, N Barniol - Sensors and Actuators A: Physical, 2022 - Elsevier
Acoustic devices have been widely used as smart chemical and biochemical sensors since
they are sensitive to mechanical, chemical, optical or electrical perturbations on their …

AlN-based HBAR ultrasonic sensor for fluid detection in microchannels with multi-frequency operation capability over the GHz range

J Yanez, E Ledesma, A Uranga… - 2021 IEEE International …, 2021 - ieeexplore.ieee.org
Current bulk acoustic microresonators offer improved resolution respect to Quartz Crystal
Microbalance and Surface Acoustic Wave devices, but tend to be brittle during operation as …

Multi-frequency thin film hbar microsensor for acoustic impedance sensing over the ghz range

J Yanez, A Uranga, N Barniol - 2021 21st International …, 2021 - ieeexplore.ieee.org
Here we present a longitudinal bulk-acoustic-wave microsensor using the pulse-echo mode
of operation to identify presence of liquid in microchannels by its compressional properties …