[HTML][HTML] Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme
Acoustic devices have been widely used as smart chemical and biochemical sensors since
they are sensitive to mechanical, chemical, optical or electrical perturbations on their …
they are sensitive to mechanical, chemical, optical or electrical perturbations on their …
AlN-based HBAR ultrasonic sensor for fluid detection in microchannels with multi-frequency operation capability over the GHz range
Current bulk acoustic microresonators offer improved resolution respect to Quartz Crystal
Microbalance and Surface Acoustic Wave devices, but tend to be brittle during operation as …
Microbalance and Surface Acoustic Wave devices, but tend to be brittle during operation as …
Multi-frequency thin film hbar microsensor for acoustic impedance sensing over the ghz range
Here we present a longitudinal bulk-acoustic-wave microsensor using the pulse-echo mode
of operation to identify presence of liquid in microchannels by its compressional properties …
of operation to identify presence of liquid in microchannels by its compressional properties …