Design and demonstration of an electromagnetic force-rebalanced sub-ten-hertz interferometric MEMS accelerometer
C Li, X Zheng, Z Sun, L Zhou, X Guo… - IEEE Transactions …, 2023 - ieeexplore.ieee.org
Grating-assisted optical interferometry is advantageous for high integration and
electromagnetic immunity and thus powerful for developing microscale accelerometers with …
electromagnetic immunity and thus powerful for developing microscale accelerometers with …
[HTML][HTML] Temperature compensation in high accuracy accelerometers using multi-sensor and machine learning methods
Temperature is a major source of inaccuracy in high-sensitivity accelerometers and
gravimeters. Active thermal control systems require power and may not be ideal in some …
gravimeters. Active thermal control systems require power and may not be ideal in some …
Sub-mK, On-package Temperature Control for High-Performance Microsystem Applications
High-precision sensing applications require stable operating environments for the
components, with temperature stability often being the most critical requirement. Existing …
components, with temperature stability often being the most critical requirement. Existing …
Three robust temperature-drift compensation strategies for a MEMS gravimeter
VM Valenzuela, D Teran, A Sandoval… - Journal of Applied …, 2023 - pubs.aip.org
Gravimeters fabricated with MEMS suffer from temperature-dependent drifts in their long-
term stability. We analyze the thermal contributions to the signal, and we propose three …
term stability. We analyze the thermal contributions to the signal, and we propose three …