Measurement of transverse piezoelectric properties of PZT thin films
Transverse piezoelectric properties of Pb (Zr, Ti) O3 (PZT) films were estimated using a
simple measuring method we developed. The c-axis oriented PZT films were epitaxially …
simple measuring method we developed. The c-axis oriented PZT films were epitaxially …
High- Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners
X Liu, LPB Katehi, WJ Chappell… - Journal of …, 2010 - ieeexplore.ieee.org
This paper presents the modeling, design, fabrication, and measurement of
microelectromechanical systems-enabled continuously tunable evanescent-mode …
microelectromechanical systems-enabled continuously tunable evanescent-mode …
Finite element reduced order models for nonlinear vibrations of piezoelectric layered beams with applications to NEMS
This article presents a finite element reduced order model for the nonlinear vibrations of
piezoelectric layered beams with application to NEMS. In this model, the geometrical …
piezoelectric layered beams with application to NEMS. In this model, the geometrical …
Crystallographic characterization of epitaxial films with different ratio grown by radio-frequency-magnetron sputtering
Crystallographic structure of as-grown epitaxial Pb (Zr, Ti) O 3 (PZT) films was investigated
with regard to the Zr/Ti ratio and crystalline orientation. PZT films with (001) and (111) …
with regard to the Zr/Ti ratio and crystalline orientation. PZT films with (001) and (111) …
Demonstration and characterization of PZT thin-film sensors and actuators for meso-and micro-structures
YC Hsu, CC Wu, CC Lee, GZ Cao, IY Shen - Sensors and Actuators A …, 2004 - Elsevier
Recent development of next-generation medical devices, such as endoscopes and hearing
aids, call for PZT (lead zirconate titanate oxide) thin-film sensors and actuators with …
aids, call for PZT (lead zirconate titanate oxide) thin-film sensors and actuators with …
Micro‐and nano‐electromechanical resonators based on SiC and group III‐nitrides for sensor applications
K Brueckner, F Niebelschuetz, K Tonisch… - … status solidi (a), 2011 - Wiley Online Library
Wide‐bandgap semiconductors represent an attractive option to meet the increasing
demands of micro‐and nano‐electromechanical systems (MEMS/NEMS) by offering new …
demands of micro‐and nano‐electromechanical systems (MEMS/NEMS) by offering new …
Static characterization and pull-in voltage of a micro-switch under both electrostatic and piezoelectric excitations
In this paper, a comprehensive model of a micro-switch with both electrostatic and
piezoelectric actuators, which accounts for the nonlinearities due to inertia, curvature …
piezoelectric actuators, which accounts for the nonlinearities due to inertia, curvature …
[HTML][HTML] Pure parametric excitation of a micro cantilever beam actuated by piezoelectric layers
This paper deals with the stability analysis of transverse motions of a cantilever microbeam
sandwiched by two piezoelectric layers located on the lower and upper surfaces of the …
sandwiched by two piezoelectric layers located on the lower and upper surfaces of the …
[HTML][HTML] Stabilizing the pull-in instability of an electro-statically actuated micro-beam using piezoelectric actuation
In the present article an investigation is presented into the stability of an electro-statically
deflected clamped–clamped micro-beam sandwiched by two piezoelectric layers …
deflected clamped–clamped micro-beam sandwiched by two piezoelectric layers …
Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb (Zr, Ti) O3 thin films
PbZr, TiO3 PZT and PbZr, Ti, NbO3 PNZT thin films have been deposited on platinized
silicon substrates by sputtering followed by a postannealing treatment. The Nb concentration …
silicon substrates by sputtering followed by a postannealing treatment. The Nb concentration …