Material science and device physics in SiC technology for high-voltage power devices

T Kimoto - Japanese Journal of Applied Physics, 2015 - iopscience.iop.org
Power semiconductor devices are key components in power conversion systems. Silicon
carbide (SiC) has received increasing attention as a wide-bandgap semiconductor suitable …

Dislocations in 4H silicon carbide

J Li, G Yang, X Liu, H Luo, L Xu, Y Zhang… - Journal of Physics D …, 2022 - iopscience.iop.org
Owing to the superior properties of the wide bandgap, high carrier mobility, high thermal
conductivity and high stability, 4H silicon carbide (4H-SiC) holds great promise for …

Mechanisms of growth and defect properties of epitaxial SiC

F La Via, M Camarda, A La Magna - Applied Physics Reviews, 2014 - pubs.aip.org
In the last ten years, large improvements in the epitaxial silicon carbide processes have
been made. The introduction of chloride precursors, the epitaxial growth on large area …

Impurities and defects in 4H silicon carbide

R Wang, Y Huang, D Yang, X Pi - Applied Physics Letters, 2023 - pubs.aip.org
The widespread use of 4H silicon carbide (4H-SiC) is just around the corner since high-
power electronics based on 4H-SiC are increasingly fabricated to enable the low-carbon …

Electronic and Optical Properties of Threading Dislocations in n-Type 4H-SiC

H Luo, J Li, G Yang, R Zhu, Y Zhang… - ACS Applied …, 2022 - ACS Publications
Despite the decades of development of the single-crystal growth and homoepitaxy of 4H
silicon carbide (4H-SiC), high-density threading dislocations (TDs) still remain in 4H-SiC. In …

Carrier lifetime and breakdown phenomena in SiC power device material

T Kimoto, H Niwa, T Okuda, E Saito… - Journal of Physics D …, 2018 - iopscience.iop.org
Recent progress and current understanding of carrier lifetimes and avalanche phenomena
in silicon carbide (SiC) are reviewed. The acceptor level of carbon vacancy (VC), called the …

Correlation between shapes of Shockley stacking faults and structures of basal plane dislocations in 4H-SiC epilayers

A Iijima, I Kamata, H Tsuchida, J Suda… - Philosophical …, 2017 - Taylor & Francis
Shockley-type stacking faults expanded in 4H–SiC epilayers induced by ultraviolet
illumination were investigated using a photoluminescence imaging method, a …

[HTML][HTML] Revisiting stacking fault identification based on the characteristic photoluminescence emission wavelengths of silicon carbide epitaxial wafers

M Na, W Bahng, H Jung, C Oh, D Jang… - Materials Science in …, 2024 - Elsevier
We revisited stacking fault identification based on the characteristic photoluminescence
emission wavelengths of 4H–SiC epitaxial wafers, and we investigated 50 000 stacking …

Design of automatic detection algorithm for dislocation contrasts in birefringence images of SiC wafers

A Kawata, K Murayama, S Sumitani… - Japanese Journal of …, 2021 - iopscience.iop.org
Birefringence imaging is one of the powerful methods for non-destructive characterization of
defects in the semiconductor crystals. However, due to the complicated and unclear …

Identification of dislocations in 4H-SiC epitaxial layers and substrates using photoluminescence imaging

C Kawahara, J Suda, T Kimoto - Japanese Journal of Applied …, 2014 - iopscience.iop.org
Dislocations in n-and p-type substrates as well as in epitaxial layers (epilayers) were clearly
identified using a photoluminescence (PL) imaging technique. Dislocations in epilayers …