Material science and device physics in SiC technology for high-voltage power devices
T Kimoto - Japanese Journal of Applied Physics, 2015 - iopscience.iop.org
Power semiconductor devices are key components in power conversion systems. Silicon
carbide (SiC) has received increasing attention as a wide-bandgap semiconductor suitable …
carbide (SiC) has received increasing attention as a wide-bandgap semiconductor suitable …
Dislocations in 4H silicon carbide
Owing to the superior properties of the wide bandgap, high carrier mobility, high thermal
conductivity and high stability, 4H silicon carbide (4H-SiC) holds great promise for …
conductivity and high stability, 4H silicon carbide (4H-SiC) holds great promise for …
Mechanisms of growth and defect properties of epitaxial SiC
In the last ten years, large improvements in the epitaxial silicon carbide processes have
been made. The introduction of chloride precursors, the epitaxial growth on large area …
been made. The introduction of chloride precursors, the epitaxial growth on large area …
Impurities and defects in 4H silicon carbide
R Wang, Y Huang, D Yang, X Pi - Applied Physics Letters, 2023 - pubs.aip.org
The widespread use of 4H silicon carbide (4H-SiC) is just around the corner since high-
power electronics based on 4H-SiC are increasingly fabricated to enable the low-carbon …
power electronics based on 4H-SiC are increasingly fabricated to enable the low-carbon …
Electronic and Optical Properties of Threading Dislocations in n-Type 4H-SiC
Despite the decades of development of the single-crystal growth and homoepitaxy of 4H
silicon carbide (4H-SiC), high-density threading dislocations (TDs) still remain in 4H-SiC. In …
silicon carbide (4H-SiC), high-density threading dislocations (TDs) still remain in 4H-SiC. In …
Carrier lifetime and breakdown phenomena in SiC power device material
T Kimoto, H Niwa, T Okuda, E Saito… - Journal of Physics D …, 2018 - iopscience.iop.org
Recent progress and current understanding of carrier lifetimes and avalanche phenomena
in silicon carbide (SiC) are reviewed. The acceptor level of carbon vacancy (VC), called the …
in silicon carbide (SiC) are reviewed. The acceptor level of carbon vacancy (VC), called the …
Correlation between shapes of Shockley stacking faults and structures of basal plane dislocations in 4H-SiC epilayers
A Iijima, I Kamata, H Tsuchida, J Suda… - Philosophical …, 2017 - Taylor & Francis
Shockley-type stacking faults expanded in 4H–SiC epilayers induced by ultraviolet
illumination were investigated using a photoluminescence imaging method, a …
illumination were investigated using a photoluminescence imaging method, a …
[HTML][HTML] Revisiting stacking fault identification based on the characteristic photoluminescence emission wavelengths of silicon carbide epitaxial wafers
M Na, W Bahng, H Jung, C Oh, D Jang… - Materials Science in …, 2024 - Elsevier
We revisited stacking fault identification based on the characteristic photoluminescence
emission wavelengths of 4H–SiC epitaxial wafers, and we investigated 50 000 stacking …
emission wavelengths of 4H–SiC epitaxial wafers, and we investigated 50 000 stacking …
Design of automatic detection algorithm for dislocation contrasts in birefringence images of SiC wafers
A Kawata, K Murayama, S Sumitani… - Japanese Journal of …, 2021 - iopscience.iop.org
Birefringence imaging is one of the powerful methods for non-destructive characterization of
defects in the semiconductor crystals. However, due to the complicated and unclear …
defects in the semiconductor crystals. However, due to the complicated and unclear …
Identification of dislocations in 4H-SiC epitaxial layers and substrates using photoluminescence imaging
Dislocations in n-and p-type substrates as well as in epitaxial layers (epilayers) were clearly
identified using a photoluminescence (PL) imaging technique. Dislocations in epilayers …
identified using a photoluminescence (PL) imaging technique. Dislocations in epilayers …