High resolution atomic force microscopy with an active piezoelectric microcantilever
H Mahmoodi Nasrabadi, M Mahdavi… - Review of Scientific …, 2022 - pubs.aip.org
Active microcantilevers with on-chip sensing and actuation provide significant advantages in
tapping mode Atomic Force Microscopy (AFM). Collocated transduction allows for effective …
tapping mode Atomic Force Microscopy (AFM). Collocated transduction allows for effective …
An all-passive compound current sensor for fast switching current monitoring
In this paper, a compound current sensor suitable for fast switching current (or similar
applications) measurement is presented. The compound sensor consists of two current …
applications) measurement is presented. The compound sensor consists of two current …
Q control of an AFM microcantilever with double-stack AlN sensors and actuators
HM Nasrabadi, M Mahdavi… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
Active Atomic Force Microscope (AFM) cantilevers with integrated actuator/sensor pairs
display larger feedthrough than conventional base excited cantilevers operating in …
display larger feedthrough than conventional base excited cantilevers operating in …
Moving coil type electromagnetic microactuator using metal/silicon driving springs and parylene connecting beams for pure in-plane large motion in three axes
H Wang, S Yamada, S Tanaka - Sensors and Actuators A: Physical, 2022 - Elsevier
In this paper, we report a three-degree-of-freedom electromagnetic microactuator with pure
in-plane bi-directional displacement in X and Y and rotation about Z. Moving coil scheme …
in-plane bi-directional displacement in X and Y and rotation about Z. Moving coil scheme …
Fabrication of multi-axis moving coil type electromagnetic micro-actuator using parylene beams for pure in-plane motion
H Wang, S Yamada, S Tanaka - 2021 21st International …, 2021 - ieeexplore.ieee.org
In this paper, we report a moving coil type electromagnetic micro-actuator, which can
achieve multi-axis in-plane motion. Magnetic transduction is the most attractive to various …
achieve multi-axis in-plane motion. Magnetic transduction is the most attractive to various …
Combining electrothermal actuation with piezoelectric actuation and sensing in a dynamic mode AFM microcantilever
HM Nasrabadi, N Nikooienejad, MB Coskun… - 2022 IEEE …, 2022 - ieeexplore.ieee.org
The embedded Z-axis positioner of an atomic force microscope (AFM) impedes parallel
imaging with active micro-cantilevers in an array configuration. In this paper, we present a …
imaging with active micro-cantilevers in an array configuration. In this paper, we present a …
AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation
HM Nasrabadi, N Nikooienejad… - 2023 IEEE/ASME …, 2023 - ieeexplore.ieee.org
The Atomic Force microscope (AFM) has limited throughput, which is a major obstacle to its
widespread industrial application. This is due to the conventional imaging technique where …
widespread industrial application. This is due to the conventional imaging technique where …
Multi-Axis Moving Coil Type Electromagnetic Actuator with Pure In-Plane Large Displacement and Rotation Angle by Using Parylene Beam and Metal Spring
H Wang, S Yamada, S Tanaka - Available at SSRN 3986706, 2022 - papers.ssrn.com
In this paper, we report a three-degree-of-freedom electromagnetic microactuator with pure
in-plane bi-directional displacement in X and Y and rotation about Z. Moving coil scheme …
in-plane bi-directional displacement in X and Y and rotation about Z. Moving coil scheme …