Nanoimprint lithography–patterning of resists using molding

H Schift, A Kristensen - Springer Handbook of Nanotechnology, 2010 - Springer
Nanoimprint lithography (NIL) is an emerging high-resolution parallel patterning method,
mainly aimed towards fields in which electron-beam and high-end photolithography are …

Chain entanglement and molecular dynamics of solution-cast PMMA/SMA blend films affected by hydrogen bonding between casting solvents and polymer chains

Y Lv, Y Lin, F Chen, F Li, Y Shangguan, Q Zheng - RSC Advances, 2015 - pubs.rsc.org
The effects of intermolecular interaction between casting solvents and polymer chains on
molecular entanglement and dynamics in solution-cast poly (methyl methacrylate)/poly …

Fabrication of platinum nanoparticles and nanowires by electron beam lithography (EBL) and nanoimprint lithography (NIL): comparison of ethylene hydrogenation …

AM Contreras, J Grunes, XM Yan, A Liddle… - Catalysis letters, 2005 - Springer
Electron beam lithography (EBL), size reduction lithography (SRL), and nanoimprint
lithography (NIL) have been utilized to produce platinum nanoparticles and nanowires in the …

Solvent-assisted polymer micro-molding

LL Han, J Zhou, X Gong, CY Gao - Chinese science bulletin, 2009 - Springer
The micro-molding technology has played an important role in fabrication of polymer micro-
patterns and development of functional devices. In such a process, suitable solvent can …

Probing the early stages of solvent evaporation and relaxation in solvent‐cast polymer thin films by spectroscopic ellipsometry

Í López García, JL Keddie… - Surface and interface …, 2011 - Wiley Online Library
The formation of solvent‐cast, poly (methyl methacrylate)(PMMA) thin films from dilute
bromobenzene solutions was studied using an ellipsometry technique. Bromobenzene has …

Measurement of residual thickness using scatterometry

D Fuard, C Perret, V Farys, C Gourgon… - Journal of Vacuum …, 2005 - pubs.aip.org
Nanoimprint lithography (NIL) processes have the characteristic that a residual resist layer is
always present between the nanoimprinted features. This residual resist layer must be …

Preparation, characterization and mechanical properties of rare-earth-based nanocomposites

SS Musbah, V Radojević, I Radović… - Journal of mining and …, 2012 - doiserbia.nb.rs
This study reports research related to different preparation methods and characterization of
polymer nanocomposites for optical applications. The Eu-ion doped Gd2O3 nanophosphor …

Nanoimprint lithography processes on 200mm Si wafer for optical application: Residual thickness etching anisotropy

N Chaix, C Gourgon, C Perret, S Landis… - Journal of Vacuum …, 2007 - pubs.aip.org
It is well known that one limitation of thermal nanoimprint lithography is the difficulty to
imprint simultaneously nano-and microstructures because of the resulting different residual …

Fabrication and characterization of slanted nanopillars array

Y Fu, NK Ann Bryan - Journal of Vacuum Science & Technology B …, 2005 - pubs.aip.org
A nanopillars array for the application of molecular controlling was fabricated by use of
focused ion-beam (FIB) fine milling on a substrate of silicon. The nanopillars array can …

4 inch lift-off process by trilayer nanoimprint lithography

J Tallal, K Berton, M Gordon, D Peyrade - Journal of Vacuum Science & …, 2005 - pubs.aip.org
We present the development of a reliable 4 in. lift-off process based on trilayer nanoimprint
lithography (NIL). At first, an inductively coupled plasma etching step of the imprinted resist …