Integration of materials other than silicon and its compounds into micromachined
transducers is a rapidly emerging area of MEMS research technology. For example, future …

The combination of thin metal cases or tubes with a filling made of metal foams is interesting
and promising for many applications in mechanical engineering. Components made of an …

This paper develops models, fabricates, experimentally tests, and optimizes a novel
piezoelectric T-beam actuator. With a T-shaped cross-section, and bottom and top flanges …

This paper presents a monolithically fabricated microelectromechanical piezoelectric
cantilever beam with a T-shaped cross section capable of in-plane and out-of-plane …