2,534,846 A 12/1950 Ambrose et al. decoupled from its optical behavior. An improved
actuation 3,439,973 A 4, 1969 Paul et al. means is provided, some one of which may be …

(60) Division of application No. 09/991.378, filed on Nov. 21. 2001, which is a continuation of
application No. 08/769.947, filed on Dec. 19, 1996, now abandoned, which is a continu ation …

(60) Division of application No. 09/413,222, filed on Oct. 5,() 1999, now abandoned, which is
a continuation-in-part of Primary Examiner Hung Xuan Dang application No. 08/744.253 …

4,099,854 4,196,396 4.228, 437 4,377,324 4.389, 096 4,392,711 4,403.248 4,441,791
4,445,050 4.459, 182 4,482,213 4,500,171 4,519,676 4,531,126 4,566,935 4,571,603 …

3,955,880 4,099,854 4,215,244 4.228, 437 4,347,983 4,377,324 4.389, 096 4,392,711
4,403.248 4,441,791 4,445,050 4.459, 182 4,482,213 4,500,171 4,519,676 4,531,126 …

A touch screen display having a touch screen directly coupled to a display is described
herein. The display may be an interferometric modular display. The touch screen may be …

(60) Division of application No. 09/966,843, filed on Sep. 28, 2001, now Pat. No. 6,867,896,
which is a division O667548 A1 8/1995 of application No. 09/056.975, filed on Apr. 8, 1998 …

This invention provides a precursor film stack for use in the production of MEMS devices.
The precursor film stack comprises a carrier substrate, a first layer formed on the carrier …

(62) Dlvlslon 9f aPP11aF19n_ N~ 100N838?'? led on Feb 19, eter Array in Silicon,” Proc.
IEEE Microelectromechanical 2002, which is a d1v1s10n of application No. 09/991,378 …

A fundamental micromachined structure having many diverse applications consists of a? rst
frame that is coupled to a plate or to a second frame by diametrically opposed torsion bars …