Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …

Acetone vapor sensing is important for environmental monitoring and non-invasive
screening of diabetes mellitus (DM). Inhaling higher than 176 parts per million (ppm) …

This current study aims to enhance the electrostatic MEMS converter performance mainly by
boosting its output power. Three different techniques are applied to accomplish such …

In this current study, the validation and evaluation of a behavioral circuit model of
electrostatic MEMS converters are presented. The main objective of such a model is to …

This paper reports the development of resonance-based temperature sensors using a wafer
level vacuum packaged SOI MEMS process which is normally used to implement various …

In this current study, the validation and evaluation of a behavioral circuit model of
electrostatic MEMS converters are presented. The main objective of such a model is to …

Abstract Micro-Electro-Mechanical Systems (MEMS) are devices that play important roles of
sensing and actuation in many different industries including automation, electronics …