A method is disclosed to fabricate an electro-mechanical device such as a MEMS or NEMS
switch. The method includes providing a structure composed of a silicon layer disposed over …

In a MEMS device having a substrate and a moveable micromachined member, a
mechanical structure secures the moveable micromachined member to the substrate …

A method is provided for forming a piezoelectric layer during a corresponding deposition
sequence. The method includes sputtering aluminum nitride onto a sputtering substrate …

Degenerately doped semiconductor materials are deployed within resonant structures to
control the first and higher order temperature coefficients of frequency, thereby enabling …

Degenerately doped semiconductor materials are deployed within resonant structures to
control the first and higher order temperature coefficients of frequency, thereby enabling …

A moveable micromachined member of a microelectrome chanical system (MEMS) device
includes an insulating layer disposed between first and second electrically conductive …

US10676349B1 - MEMS resonator - Google Patents US10676349B1 - MEMS resonator - Google
Patents MEMS resonator Download PDF Info Publication number US10676349B1 …

Related Art Micromechanical resonators are Small mechanical struc tures that are designed
to vibrate at a desired resonance frequency and/or with a desired mode shape, and are …

(57) ABSTRACT A MEMS apparatus comprising composite vibrating unit and the
manufacturing method thereof are disclosed. The vibrat ing unit includes a stiffness element …

A MEMS resonator is provided with a high quality factor and lower motional impedance. The
MEMS resonator includes a silicon layer having opposing surfaces, a piezoelectric layer …