Growth of large size diamond single crystals by plasma assisted chemical vapour deposition: Recent achievements and remaining challenges

A Tallaire, J Achard, F Silva, O Brinza… - Comptes Rendus …, 2013 - Elsevier
Diamond is a material with outstanding properties making it particularly suited for high
added-value applications such as optical windows, power electronics, radiation detection …

Large-area high-quality single crystal diamond

M Schreck, J Asmussen, S Shikata, JC Arnault… - Mrs Bulletin, 2014 - cambridge.org
Diamond offers a unique combination of extreme physical properties. For many
technological applications, diamond samples of the highest crystal quality are required to …

Single crystal diamond growth by MPCVD at subatmospheric pressures

AP Bolshakov, VG Ralchenko, G Shu, B Dai… - Materials Today …, 2020 - Elsevier
Microwave plasma assisted chemical vapor deposition (MPCVD) is the established
technique to produce high quality single crystal diamond (SCD). While typical pressures for …

Growth strategies for large and high quality single crystal diamond substrates

S Nad, Y Gu, J Asmussen - Diamond and related materials, 2015 - Elsevier
Abstract The high pressure (130–240 Torr) and high power density microwave plasma
assisted chemical vapor deposition (MPACVD) of single crystal diamond (SCD) substrates is …

Express in situ measurement of epitaxial CVD diamond film growth kinetics

EV Bushuev, VY Yurov, AP Bolshakov… - Diamond and Related …, 2017 - Elsevier
We used a low-coherence interferometry for precise continuous in situ measurements of
thickness and growth rate of epitaxial single crystal diamond layers in microwave plasma …

Experimentally defining the safe and efficient, high pressure microwave plasma assisted CVD operating regime for single crystal diamond synthesis

J Lu, Y Gu, TA Grotjohn, T Schuelke… - Diamond and related …, 2013 - Elsevier
The detailed experimental behavior of a microwave plasma assisted chemical vapor
deposition (MPACVD) reactor operating within the high, 180–300torr, pressure regime is …

Physics and application of gas discharge in millimeter wave beams

AL Vikharev, AM Gorbachev… - Journal of Physics D …, 2018 - iopscience.iop.org
The microwave discharge produced in gases by millimeter wave radiation in wave beams is
characterized by high plasma density, and wave beams allow one to control the form and …

Enhanced deposition rate of polycrystalline CVD diamond at high microwave power densities

AP Bolshakov, VG Ralchenko, VY Yurov, G Shu… - Diamond and Related …, 2019 - Elsevier
We report on growth of polycrystalline diamond (PCD) by chemical vapor deposition (CVD)
in a microwave plasma reactor under high absorbed microwave power density (MWPD) and …

[HTML][HTML] Microwave plasma CVD grown single crystal diamonds-a review

AK Mallik - Journal of Coating Science and Technology, 2016 - lifescienceglobalca.com
Diamond offers a range of unique properties, including wide band of optical transmission,
highest thermal conductivity, stiffness, wear resistance and superior electronic properties …

Investigation of homoepitaxial growth by microwave plasma CVD providing high growth rate and high quality of diamond simultaneously

AL Vikharev, MA Lobaev, AM Gorbachev… - Materials Today …, 2020 - Elsevier
Single crystal diamond (SCD) growth on (100)-oriented high-pressure high-temperature
(HPHT) type 2a diamond substrate was investigated to optimize growth conditions providing …