Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of
attention over the last two decades because of their low power consumption, easy …

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including
the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal …

This paper presents a review of electrothermal micro-actuators and applications.
Electrothermal micro-actuators have been a significant research interest over the last two …

A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …

A z-axis decoupled multi-frame vibration MEMS gyroscope (DMFVMG) is presented in this
paper. Firstly, the decoupled principle is employed and the sense frame, Coriolis frame and …

The micro-electro-mechanical systems (MEMS)-based sensor technologies are considered
to be the enabling factor for the future development of smart sensing applications, mainly …

This work demonstrates the processing, modeling, and characterization of nanocrystalline
refractory metal tantalum (Ta) as a new structural material for microelectromechanical …

This paper presents microfabrication process-driven design of a multi-degree of freedom
(multi-DoF) non-resonant electrostatic microelectromechanical systems (MEMS) gyroscope …

This article covers rigorous overview of diverse transduction principles that have enabled
successful development of micro/nanoelectromechanical systems (MEMS/NEMS) devices …

Devices based on piezoelectric actuation are some of the most promising among the
microelectromechanical systems (MEMS). Commonly, piezoelectric materials, such as …