Vacuum equipment has a wide range of applications, and vacuum monitoring in such
equipment is necessary in order to meet practical applications. Pirani sensors work by using …

This letter reports a new RF MEMS power sensor based on double-deck thermocouples with
high sensitivity and a large dynamic range. In order to improve RF sensing capability and …

A stacked double-layer (SDL) thermopile-based infrared sensor, which comprised of 96
thermocouples on a suspended membrane, has been designed and fabricated with a CMOS …

The output voltages of the thermoelectric power sensor generally have the frequency-
dependent characteristic, which influences the measurement accuracy of microwave power …

Microelectro mechanical systems (MEMS) infrared Thermopile is the core working device of
modern information detection systems such as spectrometer, gas sensor, remote …

In this paper, the design, fabrication, and testing of a CMOS compatible mid-infrared (mid-IR)
thermopile sensor comprising a stacked double layer thermopile and an interferometric …

In this letter, a novel RF power detector (PD) that operates at X-band range is presented
using standard 0.18-RF Complementary Metal Oxide Semiconductor (CMOS) technology …

In this paper, the indirectly-heated type microwave power sensors based on GaAs
micromachining are optimized to obtain a reasonable microstructure dimension and achieve …

In this paper, the design, fabrication and experimental results of the thermopile infrared
detector, with a single layer of low-stress SiN x membrane, instead of thin sandwich layer …

A new RF-thermal-electric true root mean square (rms) power detector that operates at-/-
band is proposed in the standard 0.18-RF CMOS technology. The reported detector …