Atomic layer deposition
M Ritala, M Leskelä - Handbook of Thin Films, 2002 - Elsevier
Publisher Summary This chapter deals with atomic layer deposition (ALD), which is a
chemical gas phase thin film deposition method based on alternate saturative surface …
chemical gas phase thin film deposition method based on alternate saturative surface …
Microporous and dense inorganic membranes: current status and prospective
YS Lin - Separation and Purification Technology, 2001 - Elsevier
The paper attempts to summarize recent significant progress in synthesis of microporous
and dense inorganic membranes with the help of the results obtained in the author's …
and dense inorganic membranes with the help of the results obtained in the author's …
Microporous inorganic membranes
Recent development in microporous inorganic membranes represents a significant advance
in materials for separation and chemical reaction applications. This paper provides an in …
in materials for separation and chemical reaction applications. This paper provides an in …
Atomic Layer Deposition of SiO2 and TiO2 in Alumina Tubular Membranes: Pore Reduction and Effect of Surface Species on Gas Transport
MA Cameron, IP Gartland, JA Smith, SF Diaz… - Langmuir, 2000 - ACS Publications
The pore diameters in alumina tubular membranes were progressively reduced via SiO2
and TiO2 atomic layer deposition (ALD) using sequential surface reactions. The SiO2 ALD …
and TiO2 atomic layer deposition (ALD) using sequential surface reactions. The SiO2 ALD …
Preparation of transparent anodic aluminum oxide films and their structural characteristics under thermal shock
D Xu, H Zhao, C Zhen - Microporous and Mesoporous Materials, 2024 - Elsevier
Anodic aluminum oxide (AAO) films have a wide range of research and applications in the
field of nanoscience and technology. Transparent AAO films require the oxide layer to be …
field of nanoscience and technology. Transparent AAO films require the oxide layer to be …
Atomic layer deposited aluminium oxide membranes for selective hydrogen separation through molecular sieving
X Liu, D He - Journal of Membrane Science, 2022 - Elsevier
Ultra-thin membranes have significant potential for the gas separation. However, the
fabrication of ultra-thin membrane with high selectivity and permeance remains a challenge …
fabrication of ultra-thin membrane with high selectivity and permeance remains a challenge …
Experimental and theoretical study of enhanced vapor transport through nanochannels of anodic alumina membranes in a capillary condensation regime
DI Petukhov, MV Berekchiian, ES Pyatkov… - The Journal of …, 2016 - ACS Publications
The pressure-driven flow of condensable and permanent gases was studied experimentally
for anodic alumina membranes with channel diameters ranging from 20 to 90 nm depending …
for anodic alumina membranes with channel diameters ranging from 20 to 90 nm depending …
Solubility-based gas separation with oligomer-modified inorganic membranes
A Javaid, MP Hughey, V Varutbangkul… - Journal of Membrane …, 2001 - Elsevier
The potential of hybrid organic–inorganic membranes for separating organic molecules from
air, based on a solubility-selective mechanism, was evaluated. Alumina membranes with …
air, based on a solubility-selective mechanism, was evaluated. Alumina membranes with …
Alkylamine–silica hybrid membranes for carbon dioxide/methane separation
SB Messaoud, A Takagaki, T Sugawara… - Journal of Membrane …, 2015 - Elsevier
Hybrid membranes are promising materials for the purification of natural gas from carbon
dioxide. The present paper investigates the effect of the incorporation of primary and …
dioxide. The present paper investigates the effect of the incorporation of primary and …
Asymmetric alumina membranes electrochemically formed in oxalic acid solution
P Bocchetta, C Sunseri, A Bottino, G Capannelli… - Journal of applied …, 2002 - Springer
Alumina membranes were fabricated by anodizing aluminium metal in 0.15 M oxalic acid.
The growth kinetics of the porous layer were investigated in the temperature range− 1 to 16° …
The growth kinetics of the porous layer were investigated in the temperature range− 1 to 16° …