The long-term reliability of MEMS devices related to the dielectric charging phenomenon is
one of the main hurdles in the commercialization of these devices. This paper presents a …

The movement or migration of charges in dielectric materials like silicon oxide, silicon nitride
and glass, is recognized as one of the most significant causes of drift instability of MEMS …

This letter introduces a new second-order delta-sigma method for controlling the dielectric
charge in contactless capacitive microelectromechanical systems. This method improves the …

The purpose of this paper is to show that sigma-delta controllers of dielectric charge can be
analyzed using the tools of sliding-mode controllers, in the infinite sampling frequency …

This paper presents a systematic investigation of the effect of stressing bias polarity to the
discharge process of plasma enhanced chemical vapor deposition SiN films that have been …

This paper introduces diffusive representation as a novel approach to characterize the
dynamics of charge trapped in the dielectric layers of microelectromechanical systems …

L'utilisation des technologies MEMS dans la navigation aéronautique présente deux
difficultés majeures. D'une part, le bon fonctionnement des appareils de mesure de l'aviation …

The objective of this paper is to present a charge trapping control method for MIM capacitors
in which the dielectric is made of electrospray-deposited silica nanoparticles. The influence …

The purpose of this paper is to show that the charge induced by radiation in a dielectric on
which a sigma–delta control of dielectric charge is implemented, can be seen as a …

Electrical models for MEMS varactors including the effect of dielectric charging dynamics are
not available in commercial circuit simulators. In this paper a circuit model using lumped …