Recent advances and challenges in the MOCVD growth of indium gallium nitride: A brief review

AK Tan, NA Hamzah, MA Ahmad, SS Ng… - Materials Science in …, 2022 - Elsevier
This article discusses the key challenges and the recent breakthroughs in realizing high-
quality indium (In)-rich indium gallium nitride (InGaN) epilayers and InGaN/GaN multiple …

Atomic Layer Deposition as the Enabler for the Metastable Semiconductor InN and Its Alloys

H Pedersen, CW Hsu, N Nepal… - Crystal Growth & …, 2023 - ACS Publications
Indium nitride (InN) is a low-band-gap semiconductor with unusually high electron mobility,
making it suitable for IR-range optoelectronics and high-frequency transistors. However, the …

A Strategy for Wafer‐Scale Crystalline MoS2 Thin Films with Controlled Morphology Using Pulsed Metal–Organic Chemical Vapor Deposition at Low Temperature

JH Choi, MJ Ha, JC Park, TJ Park… - Advanced Materials …, 2022 - Wiley Online Library
Abstract 2D semiconductor materials with layered crystal structures have attracted great
interest as promising candidates for electronic, optoelectronic, and sensor applications due …

Growth of High Mobility InN Film on Ga‐Polar GaN Substrate by Molecular Beam Epitaxy for Optoelectronic Device Applications

A Imran, M Sulaman, M Yousaf… - Advanced Materials …, 2023 - Wiley Online Library
The fabrication of high‐speed electronic and communication devices has rapidly grown the
demand for high mobility semiconductors. However, their high cost and complex fabrication …

Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films

S Ilhom, A Mohammad, D Shukla, J Grasso, BG Willis… - RSC …, 2020 - pubs.rsc.org
In this work, we have studied the role varying nitrogen plasma compositions play in the low-
temperature plasma-assisted growth of indium nitride (InN) thin films. Films were deposited …

[HTML][HTML] Ammonia-free epitaxy of single-crystal InN using a plasma-integrated gas-injection module

H Sakakita, N Kumagai, T Shimizu, J Kim… - Applied Materials …, 2022 - Elsevier
Group III nitride semiconductors are used for optical, high-frequency electronic, and power
devices. In particular, indium nitride (InN) and In-rich indium gallium nitride (InGaN) are …

[HTML][HTML] On the dynamics in chemical vapor deposition of InN

CW Hsu, P Deminskyi, A Persson, M Karlsson… - Journal of Applied …, 2021 - pubs.aip.org
Epitaxial nanometer-thin indium nitride (InN) films are considered promising active layers in
various device applications but remain challenging to deposit. We compare the …

Comprehensive characterization of low-damaged GaN surface exposed to NH3 plasma toward plasma-induced metalorganic chemical vapor deposition

N Kumagai, H Itagaki, J Kim, S Hirose, H Sakakita… - Applied Surface …, 2022 - Elsevier
To examine the application of plasma-induced metalorganic chemical vapor deposition
(MOCVD) toward the epitaxial growth of III-V nitride semiconductors, a GaN surface exposed …

A numerical study of the effect of pulse duration on preventing particle generation during the AlN pulsed MOCVD process

WJ Lin, JC Chen - Materials Science in Semiconductor Processing, 2022 - Elsevier
A numerical model is built to understand the transport phenomenon during the pulsed
MOCVD process. The relations between the transport behavior of the precursors and the …

Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition

H Peng, X Feng, J Gong, W Wang, H Liu, Z Quan… - Applied Surface …, 2018 - Elsevier
Indium nitride (InN) has attracted much attention due to its high electron mobility and peak
electron velocity, which make it suitable for fabrication of high-speed electronic devices. In …