Recent advances and challenges in the MOCVD growth of indium gallium nitride: A brief review
This article discusses the key challenges and the recent breakthroughs in realizing high-
quality indium (In)-rich indium gallium nitride (InGaN) epilayers and InGaN/GaN multiple …
quality indium (In)-rich indium gallium nitride (InGaN) epilayers and InGaN/GaN multiple …
Atomic Layer Deposition as the Enabler for the Metastable Semiconductor InN and Its Alloys
H Pedersen, CW Hsu, N Nepal… - Crystal Growth & …, 2023 - ACS Publications
Indium nitride (InN) is a low-band-gap semiconductor with unusually high electron mobility,
making it suitable for IR-range optoelectronics and high-frequency transistors. However, the …
making it suitable for IR-range optoelectronics and high-frequency transistors. However, the …
A Strategy for Wafer‐Scale Crystalline MoS2 Thin Films with Controlled Morphology Using Pulsed Metal–Organic Chemical Vapor Deposition at Low Temperature
Abstract 2D semiconductor materials with layered crystal structures have attracted great
interest as promising candidates for electronic, optoelectronic, and sensor applications due …
interest as promising candidates for electronic, optoelectronic, and sensor applications due …
Growth of High Mobility InN Film on Ga‐Polar GaN Substrate by Molecular Beam Epitaxy for Optoelectronic Device Applications
The fabrication of high‐speed electronic and communication devices has rapidly grown the
demand for high mobility semiconductors. However, their high cost and complex fabrication …
demand for high mobility semiconductors. However, their high cost and complex fabrication …
Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films
In this work, we have studied the role varying nitrogen plasma compositions play in the low-
temperature plasma-assisted growth of indium nitride (InN) thin films. Films were deposited …
temperature plasma-assisted growth of indium nitride (InN) thin films. Films were deposited …
[HTML][HTML] Ammonia-free epitaxy of single-crystal InN using a plasma-integrated gas-injection module
H Sakakita, N Kumagai, T Shimizu, J Kim… - Applied Materials …, 2022 - Elsevier
Group III nitride semiconductors are used for optical, high-frequency electronic, and power
devices. In particular, indium nitride (InN) and In-rich indium gallium nitride (InGaN) are …
devices. In particular, indium nitride (InN) and In-rich indium gallium nitride (InGaN) are …
[HTML][HTML] On the dynamics in chemical vapor deposition of InN
CW Hsu, P Deminskyi, A Persson, M Karlsson… - Journal of Applied …, 2021 - pubs.aip.org
Epitaxial nanometer-thin indium nitride (InN) films are considered promising active layers in
various device applications but remain challenging to deposit. We compare the …
various device applications but remain challenging to deposit. We compare the …
Comprehensive characterization of low-damaged GaN surface exposed to NH3 plasma toward plasma-induced metalorganic chemical vapor deposition
N Kumagai, H Itagaki, J Kim, S Hirose, H Sakakita… - Applied Surface …, 2022 - Elsevier
To examine the application of plasma-induced metalorganic chemical vapor deposition
(MOCVD) toward the epitaxial growth of III-V nitride semiconductors, a GaN surface exposed …
(MOCVD) toward the epitaxial growth of III-V nitride semiconductors, a GaN surface exposed …
A numerical study of the effect of pulse duration on preventing particle generation during the AlN pulsed MOCVD process
WJ Lin, JC Chen - Materials Science in Semiconductor Processing, 2022 - Elsevier
A numerical model is built to understand the transport phenomenon during the pulsed
MOCVD process. The relations between the transport behavior of the precursors and the …
MOCVD process. The relations between the transport behavior of the precursors and the …
Low temperature growth of polycrystalline InN films on non-crystalline substrates by plasma-enhanced atomic layer deposition
H Peng, X Feng, J Gong, W Wang, H Liu, Z Quan… - Applied Surface …, 2018 - Elsevier
Indium nitride (InN) has attracted much attention due to its high electron mobility and peak
electron velocity, which make it suitable for fabrication of high-speed electronic devices. In …
electron velocity, which make it suitable for fabrication of high-speed electronic devices. In …