A review on modelling and numerical simulation of micro hot embossing process: Fabrication, mold filling behavior, and demolding analysis

S Datta, SS Deshmukh, T Kar… - Engineering Research …, 2023 - iopscience.iop.org
Micro-hot embossing (micro-HE) of polymeric materials creates exact micro/nanoscale
designs. Micro-HE processes include plate-to-plate (P2P), roll-to-roll (R2R), and roll-to-plate …

Large-area stable superhydrophobic poly (dimethylsiloxane) films fabricated by thermal curing via a chemically etched template

W Xu, P Yi, J Gao, Y Deng, L Peng… - ACS applied materials & …, 2019 - ACS Publications
Inspired by nature, large-area stable superhydrophobic poly (dimethylsiloxane)(PDMS) films
have generated extensive interest for various applications such as self-cleaning, corrosion …

Tools for ultrasonic hot embossing

S Liao, C Gerhardy, J Sackmann… - Microsystem …, 2015 - Springer
Ultrasonic hot embossing has been developed in recent years enabling quick and flexible
fabrication of micro structures from thermoplastic polymers. This paper describes many …

Ultrasonic fabrication of micro nozzles from a stack of PVDF foils for generating and characterizing microfluidic dispersions

S Liao, J Sackmann, A Tollkötter, M Pasterny… - Microsystem …, 2017 - Springer
Nozzles with circular cross-section and a diameter varying in axial direction have been
fabricated in a microfluidic channel from polyvinylidene fluoride as chemically resistive …

Fabrication of nickel stamp with improved sidewall roughness for optical devices

SH Oh, SU Cho, CS Kim, YG Han, CS Cho… - Microelectronic …, 2011 - Elsevier
We proposed the simple and attractive fabrication method of nickel stamp with improved
sidewall roughness for polymeric optical devices. For this, the imprinted optical devices …

Imprinting the nanostructures on the high refractive index semiconductor glass

M Silvennoinen, K Paivasaari, JJJ Kaakkunen… - Applied surface …, 2011 - Elsevier
The centimeter range one-and two-dimensional nanostructures of 70nm pitch have been
imprinted by hot pressing with a quartz, silicon or nickel mold, at 240° C, onto the surface of …

Experimental and theoretical evaluation of wettability on micro/nano hierarchically engineered surfaces based on robust micro-post-arrayed-and highly ordered nano …

DH Kim, Y Kim, SH Hwang, YS Bang, CR Cho… - Applied surface …, 2011 - Elsevier
This paper reports a simple approach for demonstrating a micro/nano hierarchical surface,
ensuring both geometrical regularity and mechanical stability, for improving the …

Fabrication of sub-microstructures in solid copper surfaces by inverse laser microembossing

M Ehrhardt, P Lorenz, F Frost, K Zimmer - Applied Physics A, 2013 - Springer
Three-dimensional micro and nanostructuring of metal surfaces is of great interest due to the
ongoing miniaturization and increasing complexity of functional surface structures for …

Numerical simulation of hot embossing filling stage using a viscoelastic constitutive model

JM Park, TG Kang, SJ Park - Korea-Australia rheology journal, 2011 - Springer
A finite element analysis system is developed to investigate the viscoelastic deformation of
polymer during hot embossing process, employing a nonlinear viscoelastic model as a …

Fabrication and application of stainless steel stamps for the preparation of microfluidic devices

J Kotowski, D Šnita - Microelectronic engineering, 2014 - Elsevier
The use of an electrochemical polishing process to manufacture stainless steel stamps often
gives rise to problems: there is a significant release of gas bubbles that can cause the …