Thermal budget limits for low stand-by power (LSP), 0.25/spl mu/m foundry CMOS devices
have been investigated, in order to assess the impact of post-processing …

Thin film through-thickness stress gradients produce out-of-plane bending in released
microelectromechanical systems (MEMS) structures. We study the stress and stress gradient …

The structure along with the electronic and optical properties of a SiGe/BN monolayer
heterostructure were theoretically researched using density functional theory calculations …

Laser fluence and ambient environment play a significant role for the formation and
development of the micro/nano-structures on the laser irradiated targets. Single crystal (1 0 …

Atmospheric pressure plasma jet (APPJ) has been used to deposit transparent conductive
oxides (TCO) in ambient conditions with optoelectronic properties comparable to vacuum …

The deposition of in situ boron-doped polycrystalline silicon-germanium (poly-SiGe) films in
a conventional low-pressure chemical-vapor deposition reactor has been characterized …

We report observation of energy reversible switching from amorphous metal based
nanoelectromechanical (NEM) switch. For ultra-low power electronics, NEM switches can be …

Gold film is extensively used in a variety of electronic, optical, and magnetic instruments or
devices. Effect of pulsed laser irradiation on microstructure and evolution of residual stress …

This work studies the possibility to treat plasma enhanced chemical vapor deposited
(PECVD) silicon germanium (Si1− xGex) thin films grown at 400° C or lower with a pulsed …

Adhesion and residual stress play a critical role in the performance and reliability of
microdevices, in particular, the cross bridge of RF microswitches. To investigate their …