Device exploration of nanosheet transistors for sub-7-nm technology node

D Jang, D Yakimets, G Eneman… - … on Electron Devices, 2017 - ieeexplore.ieee.org
In this paper, lateral gate-all-around nano-sheet transistors (NSH-FETs) are explored from
intrinsic performance to dc and ring oscillator (RO) benchmark compared with FinFETs and …

Opportunities in device scaling for 3-nm node and beyond: FinFET versus GAA-FET versus UFET

UK Das, TK Bhattacharyya - IEEE transactions on electron …, 2020 - ieeexplore.ieee.org
The performances of FinFET, gate-all-around (GAA) nanowire/nanosheet, and U-shaped
FETs (UFETs) are studied targeting the 3-nm node (N3) and beyond CMOS dimensions. To …

Investigation of self-heating effects in vertically stacked GAA MOSFET with wrap-around contact

SJ Kang, JH Kim, YS Song, S Go… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
A contact resistance () becomes a major parasitic resistance in highly scaled modern
semiconductor devices. A wrap-around contact (WAC) has been suggested as a promising …

Design study of the gate-all-around silicon nanosheet MOSFETs

Y Lee, GH Park, B Choi, J Yoon, HJ Kim… - Semiconductor …, 2020 - iopscience.iop.org
The gate-all-around (GAA) silicon nanosheet (SiNS) metal-oxide-semiconductor field-effect
transistor (MOSFET) structures have been recognized as excellent candidates to achieve …

Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching Ohm-cm2

H Yu, M Schaekers, A Peter, G Pourtois… - … on Electron Devices, 2016 - ieeexplore.ieee.org
In recent CMOS technology, extreme shrinking of contact area at source/drain regions raises
serious concerns of high metal/semiconductor contact resistance. Confronting this problem …

Accurate collision response on polygonal meshes

P Volino, NM Thalmann - Proceedings Computer Animation …, 2000 - ieeexplore.ieee.org
We present a very general geometrical correction method for enforcing collisions and other
geometrical constraints between polygonal mesh surfaces. It is based on a global resolution …

TiSi(Ge) Contacts Formed at Low Temperature Achieving Around cm2 Contact Resistivities to p-SiGe

H Yu, M Schaekers, J Zhang, LL Wang… - … on Electron Devices, 2017 - ieeexplore.ieee.org
This paper reports ultralow contact resistivities (ρ c) achieved on highly doped p-SiGe with
two low-temperature contact formation methods. One method combines precontact …

Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration

C Porret, A Hikavyy, JFG Granados… - ECS Journal of Solid …, 2019 - iopscience.iop.org
As CMOS scaling proceeds with sub-10 nm nodes, new architectures and materials are
implemented to continue increasing performances at constant footprint. Strained and …

Low track height standard cell design in iN7 using scaling boosters

SMY Sherazi, C Jha, D Rodopoulos… - … Co-optimization for …, 2017 - spiedigitallibrary.org
In this paper, standard cell design for iN7 CMOS platform technology targeting the tightest
contacted poly pitch (CPP) of 42 nm and a metal pitch of 32 nm in the FinFET technology is …

Exchange-driven magnetic logic

O Zografos, M Manfrini, A Vaysset, B Sorée… - Scientific reports, 2017 - nature.com
Direct exchange interaction allows spins to be magnetically ordered. Additionally, it can be
an efficient manipulation pathway for low-powered spintronic logic devices. We present a …