Spin-orbit torque MRAM structure and manufacture thereof
M Yu, W Wang, AHN Jaesoo, JM Kim, S Patel… - US Patent …, 2023 - Google Patents
Embodiments of the present disclosure generally include spin-orbit torque magnetoresistive
random-access memory (SOT-MRAM) devices and methods of manufacture thereof. The …
random-access memory (SOT-MRAM) devices and methods of manufacture thereof. The …
Spin orbit torque MRAM and manufacture thereof
The bottom-pinned spin-orbit torque (SOT) MRAM devices are fabricated to form high quality
interfaces between layers including the spin-orbit torque (SOT) layer and the free layer of the …
interfaces between layers including the spin-orbit torque (SOT) layer and the free layer of the …
Semiconductor device and method for fabricating the same
HC Lin - US Patent 12,089,508, 2024 - Google Patents
A method for fabricating semiconductor device includes the steps of first providing a
substrate having a magnetic random access memory (MRAM) region and a logic region …
substrate having a magnetic random access memory (MRAM) region and a logic region …
Magnetic tunnel junction device with air gap
C Kothandaraman, NP Marchack… - US Patent 11,937,512, 2024 - Google Patents
A semiconductor device including a magnetic tunnel junction stack, a metallic hard mask
aligned above the magnetic tunnel junction stack and an air gap surrounding the metallic …
aligned above the magnetic tunnel junction stack and an air gap surrounding the metallic …
Semiconductor device and method for fabricating the same
W Hui-Lin, W Chen, PK Hsu, YP Wang… - US Patent …, 2024 - Google Patents
A method for fabricating a semiconductor device includes the steps of: forming a first inter-
metal dielectric (IMD) layer on a substrate; forming a first metal interconnection and a …
metal dielectric (IMD) layer on a substrate; forming a first metal interconnection and a …