Spin-orbit torque MRAM structure and manufacture thereof

M Yu, W Wang, AHN Jaesoo, JM Kim, S Patel… - US Patent …, 2023 - Google Patents
Embodiments of the present disclosure generally include spin-orbit torque magnetoresistive
random-access memory (SOT-MRAM) devices and methods of manufacture thereof. The …

Spin orbit torque MRAM and manufacture thereof

AHN Jaesoo, C Park, H Tseng, XUE Lin… - US Patent …, 2020 - Google Patents
The bottom-pinned spin-orbit torque (SOT) MRAM devices are fabricated to form high quality
interfaces between layers including the spin-orbit torque (SOT) layer and the free layer of the …

Semiconductor device and method for fabricating the same

HC Lin - US Patent 12,089,508, 2024 - Google Patents
A method for fabricating semiconductor device includes the steps of first providing a
substrate having a magnetic random access memory (MRAM) region and a logic region …

Magnetic tunnel junction device with air gap

C Kothandaraman, NP Marchack… - US Patent 11,937,512, 2024 - Google Patents
A semiconductor device including a magnetic tunnel junction stack, a metallic hard mask
aligned above the magnetic tunnel junction stack and an air gap surrounding the metallic …

Semiconductor device and method for fabricating the same

W Hui-Lin, W Chen, PK Hsu, YP Wang… - US Patent …, 2024 - Google Patents
A method for fabricating a semiconductor device includes the steps of: forming a first inter-
metal dielectric (IMD) layer on a substrate; forming a first metal interconnection and a …