The MEMS gyroscope by means of oven control, or the so-called ovenized MEMS
gyroscope, isolates the die from the external environment and utilizes a closed-loop …

An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

We present a new temperature compensation system for microresonator-based frequency
references. It consists of a phase-locked loop (PLL) whose inputs are derived from two …

Utilizing silicon and silicon dioxide's opposing temperature coefficients of Young's modulus,
composite resonators with zero linear temperature coefficient of frequency are fabricated …

In this paper we present the temperature compensation of aluminum nitride (AlN) Lamb
wave resonators for a future application to XOs and TCXOs for a frequency ranging from 100 …

We demonstrate systematic control of mechanical nonlinearities in micro-electromechanical
(MEMS) resonators using shape optimization methods. This approach generates beams …

This paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with a
quality factor of 15 000 in air, and over a million below 10 mTorr at a resonant frequency of …

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a
quality factor of larger than one million and a resonant frequency of 2.18 MHz is …

This work demonstrates, for the first time, ovenization of a fully-encapsulated dual-mode
silicon MEMS resonator operational over a large ambient temperature range. We maintain a …

The frequency stability of single-crystal silicon microelectromechanical systems resonators
encapsulated with epitaxial polysilicon (epi-seal) is investigated. As silicon resonators have …