MEMS inertial sensor calibration technology: Current status and future trends

X Ru, N Gu, H Shang, H Zhang - Micromachines, 2022 - mdpi.com
A review of various calibration techniques of MEMS inertial sensors is presented in this
paper. MEMS inertial sensors are subject to various sources of error, so it is essential to …

Artificial intelligence applications for MEMS-based sensors and manufacturing process optimization

I Podder, T Fischl, U Bub - Telecom, 2023 - mdpi.com
Micro-electromechanical systems (MEMS) technology-based sensors have found diverse
fields of application due to the advancement in semiconductor manufacturing technology …

Tilt sensor with recalibration feature based on MEMS accelerometer

S Łuczak, M Zams, B Dąbrowski, Z Kusznierewicz - Sensors, 2022 - mdpi.com
The main errors of MEMS accelerometers are misalignments of their sensitivity axes, thermal
and long-term drifts, imprecise factory calibration, and aging phenomena. In order to reduce …

Electric-contact tilt sensors: A review

S Łuczak, M Ekwińska - Sensors, 2021 - mdpi.com
A review of various kinds of solid tilts sensors, using a free mechanical member for
generation of electric-contact (mostly a ball), is presented. Standard and original solutions …

Development of synchronized high-sensitivity wireless accelerometer for structural health monitoring

SA Veluthedath Shajihan, R Chow, K Mechitov, Y Fu… - Sensors, 2020 - mdpi.com
The use of digital accelerometers featuring high sensitivity and low noise levels in wireless
smart sensors (WSSs) is becoming increasingly common for structural health monitoring …

Effects of natural aging in biaxial MEMS accelerometers

S Łuczak, J Wierciak, W Credo - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
Effects of a fully natural aging of MEMS accelerometers are evaluated with regard to
changes in their performance. Two models of commercial dual-axis accelerometers (two …

Drift of MEMS capacitive accelerometers for one-year room-temperature storage: a simulation and experimental study

P Peng, W Zhou, L Li, J He, B Peng, H Yu… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
In this study, the drift of microelectromechanical system (MEMS) accelerometers stored at
room temperature for one year is investigated by both finite-element analysis (FEA) …

[HTML][HTML] The Utility of Calibrating Wearable Sensors before Quantifying Infant Leg Movements

J Oh, GE Loeb, BA Smith - Sensors, 2024 - mdpi.com
While interest in using wearable sensors to measure infant leg movement is increasing,
attention should be paid to the characteristics of the sensors. Specifically, offset error in the …

Stress-and-temperature-induced drift compensation on a high dynamic range accelerometer array using deep neural networks

VPJ Chung, YC Lin, X Li, MG Guney… - 2021 IEEE 34th …, 2021 - ieeexplore.ieee.org
Acceleration random walk, from its name, is widely modeled as an error from random
processes. Contrarily, we hypothesize that acceleration random walk at the averaging time …

A Broadband and Low Damping Piezoelectric MEMS Vibration Platform for 6-DOF Inertial Motion

Y Xing, T Yu, H Yan, C Yue, J Zhao, M Hu… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
Vibration platform-based inertia/force sources bring great benefits to the testing and
calibration of micro-electro-mechanical system (MEMS) sensor performance. The traditional …