Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

Optimal cyclic scheduling problems of wafer-residency-time-constrained dual-arm cluster
tools in wafer fabrication are challenging and remain to be fully solved. Existing studies …

Accompanying the unceasing progress of integrated circuit manufacturing technology, the
mainstream production mode of current semiconductor wafer fabrication is featured with …

In semiconductor manufacturing, cluster tools tend to integrate a vacuum module (VM), a
loadlock module (LLM), and an equipment front-end module (EFEM). While scheduling …

A dual-gripper robotic cell consists of multiple processing machines and one material
handling robot, which can perform an unloading or a loading task one at a time but can hold …

Robotized manufacturing systems consisting of several processing machines and a robot for
transporting jobs between the machines have been widely used in mechanical and …

With the reduction of wafer batch size on account of the diversification and individuation of
consumption demands, increasing importance has been attached to the schedulability and …

Cluster tools, which consist of processing modules (PMs) and a transport robot, are used for
wafer fabrication processes in semiconductor manufacturing fabs. Once processing of a …

We examine a scheduling problem for a dual-armed cluster tool that processes multiple
similar wafer types concurrently. It has been recently proved that the well-known swap …

In today's semiconductor manufacturing industry, wafer foundries often face the challenge of
producing a variety of integrated circuit chip products using a single manufacturing line. To …