An extensive review is given of the results from literature on electron beam induced
deposition. Electron beam induced deposition is a complex process, where many and often …

Focused electron-beam-induced (FEB-induced) deposition and etching are versatile, direct-
write nanofabrication schemes that allow for selective deposition or removal of a variety of …

Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …

The nanoscaling of metamaterial structures represents a technological challenge toward
their application in the optical frequency range. In this work we demonstrate tailored chiro …

During the past decade, significant progress has been made in the field of resonant optics
ranging from fundamental aspects to concrete applications. While several techniques have …

The creation of functional nanostructures by electron-beam-induced deposition (EBID) is
becoming more widespread. The benefits of the technology include fast'point-and …

Scanning probe microscopy (SPM) has become an essential surface characterization
technique in research and development. By concept, SPM performance crucially depends …

The technique of electron-beam-induced deposition (EBID), when performed with organic
precursors, typically results in relatively low metal content due to the partial decomposition of …

This article reviews the state-of-the-art of mechanical material properties and measurement
methods of nanostructures obtained by two nanoscale additive manufacturing methods: gas …

Contamination is an undesired side effect in many electron microscopy studies that covers
structures of interest and degrades resolution. Although contamination has been studied for …