Challenges and opportunities in advanced Ge pMOSFETs

E Simoen, J Mitard, G Hellings, G Eneman… - Materials Science in …, 2012 - Elsevier
This paper aims at reviewing the state-of-the art of Ge pMOSFETs for future high-
performance CMOS devices. Key in the development is the integration of a Ge channel on a …

Mobility enhancement technology for scaling of CMOS devices: overview and status

Y Song, H Zhou, Q Xu, J Luo, H Yin, J Yan… - Journal of electronic …, 2011 - Springer
The aggressive downscaling of complementary metal–oxide–semiconductor (CMOS)
technology to the sub-21-nm technology node is facing great challenges. Innovative …

Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition

B Vincent, F Gencarelli, H Bender, C Merckling… - Applied Physics …, 2011 - pubs.aip.org
In this letter, we propose an atmospheric pressure-chemical vapor deposition technique to
grow metastable GeSn epitaxial layers on Ge. We report the growth of defect free fully …

Germanium-on-silicon mid-infrared arrayed waveguide grating multiplexers

A Malik, M Muneeb, S Pathak… - IEEE Photonics …, 2013 - ieeexplore.ieee.org
In this letter, we describe the use of a germanium-on-silicon waveguide platform to realize
an arrayed waveguide grating (AWG) operating in the 5 μm wavelength range, which can be …

Crystalline properties and strain relaxation mechanism of CVD grown GeSn

F Gencarelli, B Vincent… - ECS Journal of Solid …, 2013 - iopscience.iop.org
In this contribution, we discuss the crystalline properties of strained and strain-relaxed CVD-
grown GeSn layers with Sn content in the range 6.4–12.6 at.%. A positive deviation from …

Wafer‐scale Ge epitaxial foils grown at high growth rates and released from porous substrates for triple‐junction solar cells

V Depauw, C Porret, M Moelants… - Progress in …, 2023 - Wiley Online Library
Germanium is listed as a critical raw material, and for environmental and economic
sustainability reasons, strategies for lower consumption must be implemented. A promising …

Characterization of GeSn materials for future Ge pMOSFETs source/drain stressors

B Vincent, Y Shimura, S Takeuchi, T Nishimura… - Microelectronic …, 2011 - Elsevier
In order to outperform current uniaxial compressively strained Silicon channel pMOSFET
technology (with embedded SiGe source/drain), switching to strained Ge channel is …

Next generation of Ge1− ySny (y= 0.01-0.09) alloys grown on Si (100) via Ge3H8 and SnD4: Reaction kinetics and tunable emission

G Grzybowski, RT Beeler, L Jiang, DJ Smith… - Applied physics …, 2012 - pubs.aip.org
Film growth and reaction kinetics studies have shown that trigermane (Ge 3 H 8) is a
superior Ge source for the epitaxial synthesis of Ge 1− y Sn y/Si (100) alloys using ultra-high …

Mid-infrared all-optical modulation in low-loss germanium-on-silicon waveguides

L Shen, N Healy, CJ Mitchell, JS Penades… - Optics letters, 2015 - opg.optica.org
All-optical modulation has been demonstrated in a germanium-on-silicon rib waveguide
over the mid-infrared wavelength range of 2–3 μm using a free-carrier absorption scheme …

Low-temperature Ge and GeSn chemical vapor deposition using Ge2H6

F Gencarelli, B Vincent, L Souriau, O Richard… - Thin Solid Films, 2012 - Elsevier
In this work, digermane (Ge2H6) is investigated as low temperature Ge precursor for
Chemical Vapor Deposition. High quality Ge epitaxial growth on Si substrates is reported at …