[引用][C] Tunable low-loss silicon nitride integrated circuits
AS Baburin, ES Lotkov, EV Sergeev… - … Laser Optics (ICLO), 2022 - ieeexplore.ieee.org
Tunable low-loss silicon nitride integrated circuits Page 1 Tunable low-loss silicon nitride
integrated circuits AS Baburin'”", ES Lotkov’”, EV Sergeev!”, M. Andronic’, DA Baklykov!”, VE …
integrated circuits AS Baburin'”", ES Lotkov’”, EV Sergeev!”, M. Andronic’, DA Baklykov!”, VE …