Improved Yield Prediction and Failure Analysis in Semiconductor Manufacturing with XGBoost and Shapley Additive exPlanations Models
S Wang, Y Chen - 2024 IEEE International Symposium on the …, 2024 - ieeexplore.ieee.org
In the domain of semiconductor manufacturing, the accurate prediction of wafer yield and
subsequent failure analysis (FA) are of critical importance with respect to the assurance of …
subsequent failure analysis (FA) are of critical importance with respect to the assurance of …