Foundations of physical vapor deposition with plasma assistance

JT Gudmundsson, A Anders… - … Sources Science and …, 2022 - iopscience.iop.org
Physical vapor deposition (PVD) refers to the removal of atoms from a solid or a liquid by
physical means, followed by deposition of those atoms on a nearby surface to form a thin …

Theory and molecular simulations of plasma sputtering, transport and deposition processes

P Brault, AL Thomann, M Cavarroc - The European Physical Journal D, 2023 - Springer
The present review provides an overview of the basic theory of sputtering with recent
models, focusing in particular on sputtered atom energy distribution functions. Molecular …

Practical classical molecular dynamics simulations for low-temperature plasma processing: a review

P Brault - Reviews of Modern Plasma Physics, 2024 - Springer
Molecular dynamics simulations are becoming a powerful tool for examining and predicting
atomic and molecular processes in various environments. The present review showcases …

Nanovoid formation mechanism in nanotwinned Cu

C Fan, H Wang, X Zhang - Discover Nano, 2024 - Springer
Nanotwinned metals have been intensely investigated due to their unique microstructures
and superior properties. This work aims to investigate the nanovoid formation mechanism in …

Adjustment of high-energy ion flux in BP-HiPIMS via pulsed coil magnetic field: plasma dynamics and film deposition

Y Luo, M Han, Y Su, H Li, D Li, L Tang… - Plasma Sources …, 2022 - iopscience.iop.org
As an emerging and extraordinary plasma source, bipolar pulsed high power impulse
magnetron sputtering (BP-HiPIMS) discharge has been widely concerned by academia and …

Effects of duty cycle and nitrogen flow rate on the mechanical properties of (V, Mo) N coatings deposited by high-power pulsed magnetron sputtering

Y Feng, TF Chung, CN Hsiao, JH Huang - Journal of Vacuum Science …, 2023 - pubs.aip.org
(V, Mo) N is theoretically predicted to have high hardness and fracture toughness and is a
promising material for the application on protective hard coatings. However, the toughness …

Probing trade-off between critical size and velocity in cold-spray: An atomistic simulation

M Ghasemi, A Seifi, M Kateb… - Journal of Vacuum …, 2024 - hal.science
The detailed mechanism of bonding in the cold spray process has remained elusive for both
experimental and theoretical parties. Adiabatic shear instability and hydrodynamic plasticity …

[HTML][HTML] Epitaxial growth and characterization of (001)[NiFe/M] 20 (M= Cu, CuPt and Pt) superlattices

M Kateb, JT Gudmundsson, S Ingvarsson - Surfaces and Interfaces, 2023 - Elsevier
We present optimization of [(15 Å) Ni 80 Fe 20/(5 Å) M] 20 single crystal multilayers on (001)
MgO substrates, with M being Cu, Cu 50 Pt 50 and Pt. These superlattices were …

The role of sputtered atom and ion energy distribution in films deposited by Physical Vapor Deposition: A molecular dynamics approach

S Atmane, M Alexandre, A Caillard… - arXiv preprint arXiv …, 2024 - arxiv.org
We present a comparative study of copper film growth with a constant energy neutral beam,
thermal evaporation, dc magnetron sputtering, high-power impulse magnetron sputtering …

Distinct melting behaviour of partially oxidized Cu nanoparticles and nanowires

M Kateb, A Manolescu - arXiv preprint arXiv:2302.02219, 2023 - arxiv.org
While most of the experimental studies are dealing with partially oxidized metallic
nanosolids, their behaviour is not well understood theoretically. To this end we utilized …