This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …

Resonant and acoustic wave devices have been researched for several decades for
application in the gravimetric sensing of a variety of biological and chemical analytes. These …

Mode interactions have recently become the focus of intense research in micro/
nanoelectromechanical systems (M/NEMS) due to their ability to improve device …

This paper reports on the first use of strongly coupled microresonators to improve the
sensitivity of resonant sensing systems. To date, the research on coupled resonant sensors …

Resonating MEMS mass sensors are microdevices with broad applications in fields such as
bioscience and biochemistry. Their advantageous surface-to-volume ratio makes their …

The temperature and humidity dependence of the quality factor of MEMS lateral rotary
resonators operating in atmospheric air was analyzed and measured. The quality factor of a …

This paper describes the use of the coupling beam in a pair of mechanically coupled Lamé
mode resonators to enhance electromechanical transduction by piezoresistive sensing …

We have developed a hybrid device that fuses the techniques of acoustofluidic localization
and resonator-based mass sensing of particles in liquid-phase for in-situ analysis in a …

A bulk acoustic mode micro-electro-mechanical dual resonator platform is utilised to study
the evaporation of sub-microliter water droplets from the surface of the resonator. An …