Modeling and control of piezo-actuated nanopositioning stages: A survey
Piezo-actuated stages have become more and more promising in nanopositioning
applications due to the excellent advantages of the fast response time, large mechanical …
applications due to the excellent advantages of the fast response time, large mechanical …
A review of nanometer resolution position sensors: Operation and performance
AJ Fleming - Sensors and Actuators A: Physical, 2013 - Elsevier
Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …
and fabrication machines. Since the sensor characteristics can define the linearity …
Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
YK Yong, SOR Moheimani, BJ Kenton… - Review of scientific …, 2012 - pubs.aip.org
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
High-speed multiresolution scanning probe microscopy based on Lissajous scan trajectories
A novel scan trajectory for high-speed scanning probe microscopy is presented in which the
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …
probe follows a two-dimensional Lissajous pattern. The Lissajous pattern is generated by …
High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues
Tracking of triangular or sawtooth waveforms is a major difficulty for achieving high-speed
operation in many scanning applications such as scanning probe microscopy. Such non …
operation in many scanning applications such as scanning probe microscopy. Such non …
Nanopositioning system with force feedback for high-performance tracking and vibration control
AJ Fleming - IEEE/Asme Transactions on Mechatronics, 2009 - ieeexplore.ieee.org
In this study, the actuator load force of a nanopositioning stage is utilized as a feedback
variable to achieve both tracking and damping. The transfer function from the applied …
variable to achieve both tracking and damping. The transfer function from the applied …
Review on multi-degree-of-freedom piezoelectric motion stage
Multi-degree-of-freedom (multi-DOF) piezoelectric motion stage is an important part of
modern manufacturing industry. In order to perform high precision outputs in a large travel …
modern manufacturing industry. In order to perform high precision outputs in a large travel …
A novel cooperative compensation method to compensate for return stroke of stick-slip piezoelectric actuators
With the development of micro-electromechanical systems, high precision actuators with
high resolution, fast speed, large load capacity are increasingly required. Thanks to the …
high resolution, fast speed, large load capacity are increasingly required. Thanks to the …
Proxy-based sliding-mode tracking control of piezoelectric-actuated nanopositioning stages
In this paper, a proxy-based sliding-mode control (PBSMC) approach is proposed for robust
tracking control of a piezoelectric-actuated nanopositioning stage composed of piezoelectric …
tracking control of a piezoelectric-actuated nanopositioning stage composed of piezoelectric …
High-speed tracking of a nanopositioning stage using modified repetitive control
In this paper, a modified repetitive control (MRC) based approach is developed for high-
speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed …
speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed …